公开(公告)号：US20220314364A1

公开(公告)日：2022-10-06

申请号：US17595764

申请日：2021-04-06

申请人： PHILOPTICS CO., LTD.

发明人： Sangwon SHIM ,  Doyeoun HWANG ,  Yu Jin NAM ,  Sang-gil RYU ,  Sungju YU ,  Min Hwan CHOI

IPC分类号： B23K26/082 ,  B23K26/06 ,  B23K26/046 ,  B23K26/073 ,  B23K26/067

摘要： A laser processing system according to an embodiment of the present invention includes: a laser unit emitting a laser beam; an optical unit disposed on a propagation path of the laser beam and modulating the incident laser beam into a Bessel beam; a stage on which a workpiece to be processed with the Bessel beam emitted from the optical unit is mounted; and a control unit for controlling the operations of the laser unit, the optical unit, and the stage, wherein the optical unit is configured to position the focus line of the emitted Bessel beam on the workpiece and to move the focus line positioned on the workpiece with a predetermined range.