公开(公告)号：US20170271187A1

公开(公告)日：2017-09-21

申请号：US15267698

申请日：2016-09-16

申请人： PIOTECH CO., LTD.

发明人： Ren ZHOU ,  Xuyen Pham ,  Brian Lu ,  Sean Chang ,  Shicai Fang ,  Jie Lian ,  Enguo Men

IPC分类号： H01L21/673 ,  H01L21/687 ,  H01L21/677

CPC分类号： H01L21/67201

摘要： Disclosed is a load lock chamber which includes a chamber body including: at least one pair of cavities, defined in a layer structure of the chamber body to carry one or more wafer substrates; at least one internal conduit, defined between and coupled with the paired cavities, such that the paired cavities are communicated with each other and capable of conducting gas refilling and exhaustion; and a plurality of wafer supports for carrying the wafer substrates, the plurality of wafer supports being securely received in the paired cavities and able to calibrate with a machine arm frontend finger, wherein the wafer support includes grooves defined thereon for calibrating the machine arm frontend finger.