公开(公告)号：US20040251906A1

公开(公告)日：2004-12-16

申请号：US10839545

申请日：2004-05-04

Applicant: PTS Corporation

Inventor： Bevan Staple ,  Robert Anderson

IPC: G01R031/02

CPC classification number: G02B26/0841

Abstract: A configuration is provided by which it may be determined whether a MEMS device is in a select state. The select state is defined by a position of a moveable element, which is moved with electrostatic forces upon activation of an electrode. The select state is detected with a sensing configuration that has first and second regions. The regions are generally separated such that they are electrically uncoupled unless the moveable element is in the position that defines the select state. A detector may be provided to indicate whether the first and second regions are coupled electrically.

公开(公告)号：US20040022931A1

公开(公告)日：2004-02-05

申请号：US10632698

申请日：2003-08-01

Applicant: PTS Corporation

Inventor： Bevan Staple ,  David Miller ,  Lilac Muller

IPC: B05D005/12

CPC classification number: B81C1/00476 ,  B81B2201/042 ,  B81C2201/117

Abstract: A method is provided for preventing dopant leaching from a doped structural film during fabrication of a microelectromechanical system. A microstructure that includes the doped structural film, sacrificial material, and metallic material is produced with a combination of deposition, patterning, and etching techniques. The sacrificial material is dissolved with a release solution that has a substance destructive to the sacrificial material. This substance also acts as an electrolyte, forming a galvanic cell with the doped structural film and metallic material acting as electrodes. The effects of the galvanic cell are suppressed by including a nonionic detergent mixed in the release solution.

Abstract translation: 提供了一种在微电子机械系统的制造期间防止掺杂的结构膜的掺杂剂浸出的方法。 包括掺杂的结构膜，牺牲材料和金属材料的微结构通过沉积，图案化和蚀刻技术的组合来生产。 牺牲材料用具有对牺牲材料具有破坏性的物质的释放溶液溶解。 该物质还用作电解质，形成具有掺杂结构膜和金属材料作为电极的原电池。 通过包括混合在脱模溶液中的非离子洗涤剂来抑制原电池的影响。

公开(公告)号：US20040223686A1

公开(公告)日：2004-11-11

申请号：US10791633

申请日：2004-03-01

Applicant: PTS Corporation

Inventor： Bevan Staple ,  Richard Roth

IPC: G02B006/35

CPC classification number: B81B3/0008 ,  B81B2201/042 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3548 ,  G02B6/3556 ,  G02B6/3558 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/358

Abstract: A microstructure for steering light that mitigates stiction problems is provided. A first tiltable assembly that includes a reflective coating is connected with a substrate. A second tiltable assembly is also connected with the substrate. First hand second electrodes are connected with the substrate and are configured to tilt the two tiltable assemblies such that they are interdigitated. In various embodiments, the tiltable assemblies are configured as cantilever arrangements and/or torsion-beam arrangements.

Abstract translation: 提供了一种减轻沉降问题的转向灯微结构。 包括反射涂层的第一可倾斜组件与衬底连接。 第二可倾斜组件也与衬底连接。 第一手第二电极与衬底连接并且被配置为使两个可倾斜组件倾斜以使它们相互交错。 在各种实施例中，可倾斜组件被配置为悬臂布置和/或扭力梁布置。