公开(公告)号：US20040245889A1

公开(公告)日：2004-12-09

申请号：US10719858

申请日：2003-11-20

Applicant: PTS Corporation

Inventor： David Miller ,  Lilac Muller ,  Robert L. Anderson

IPC: G02B026/08 ,  H02N001/00

CPC classification number: G02B6/352 ,  B81B2201/042 ,  B81C1/00968 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/3564 ,  G02B6/3568 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0841 ,  H02N1/002 ,  H02N1/006

Abstract: A number of methods and systems for overcoming stiction are provided. The systems include electro-mechanical systems capable of exerting a variety of forces upon areas prone to stiction. The systems can be MEMS arrays or other types of devices where stiction related forces occur. The methods include a variety of ways of causing movement in areas prone to stiction forces. Such movement can be vibrational in nature and is sufficient to overcome stiction, allowing a trapped element to be moveed to a desired location.

Abstract translation: 提供了一些用于克服静摩擦的方法和系统。 这些系统包括能够在容易产生静电的区域上施加各种力的机电系统。 这些系统可以是MEMS阵列或其他类型的器件，其中发生静摩擦力。 这些方法包括在容易产生粘连力的地区引起运动的各种方法。 这种运动本质上可以是振动的，并且足以克服静摩擦，允许被困元件移动到期望的位置。

公开(公告)号：US20040113516A1

公开(公告)日：2004-06-17

申请号：US10719181

申请日：2003-11-20

Applicant: PTS Corporation

Inventor： David Miller ,  Lilac Muller ,  Robert L. Anderson

IPC: H02N001/00

CPC classification number: G02B6/352 ,  B81B2201/042 ,  B81C1/00968 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/3564 ,  G02B6/3568 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0841 ,  H02N1/002 ,  H02N1/006

Abstract: A number of methods and systems for overcoming stiction are provided. The systems include electro-mechanical systems capable of exerting a variety of forces upon areas prone to stiction. The systems can be MEMS arrays or other types of devices where stiction related forces occur. The methods include a variety of ways of causing movement in areas prone to stiction forces. Such movement can be vibrational in nature and is sufficient to overcome stiction, allowing a trapped element to be moveed to a desired location.

公开(公告)号：US20040101234A1

公开(公告)日：2004-05-27

申请号：US10719857

申请日：2003-11-20

Applicant: PTS Corporation

Inventor： David Miller ,  Lilac Muller ,  Robert L. Anderson

IPC: G02B006/26

CPC classification number: G02B6/352 ,  B81B2201/042 ,  B81C1/00968 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/3564 ,  G02B6/3568 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0841 ,  H02N1/002 ,  H02N1/006

Abstract: A number of methods and systems for overcoming stiction are provided. The systems include electromechanical systems capable of exerting a variety of forces upon areas prone to stiction. The systems can be MEMS arrays or other types of devices where stiction related forces occur. The methods include a variety of ways of causing movement in areas prone to stiction forces. Such movement can be vibrational in nature and is sufficient to overcome stiction, allowing a trapped element to be moveed to a desired location.

公开(公告)号：US20040022931A1

公开(公告)日：2004-02-05

申请号：US10632698

申请日：2003-08-01

Applicant: PTS Corporation

Inventor： Bevan Staple ,  David Miller ,  Lilac Muller

IPC: B05D005/12

CPC classification number: B81C1/00476 ,  B81B2201/042 ,  B81C2201/117

Abstract: A method is provided for preventing dopant leaching from a doped structural film during fabrication of a microelectromechanical system. A microstructure that includes the doped structural film, sacrificial material, and metallic material is produced with a combination of deposition, patterning, and etching techniques. The sacrificial material is dissolved with a release solution that has a substance destructive to the sacrificial material. This substance also acts as an electrolyte, forming a galvanic cell with the doped structural film and metallic material acting as electrodes. The effects of the galvanic cell are suppressed by including a nonionic detergent mixed in the release solution.

Abstract translation: 提供了一种在微电子机械系统的制造期间防止掺杂的结构膜的掺杂剂浸出的方法。 包括掺杂的结构膜，牺牲材料和金属材料的微结构通过沉积，图案化和蚀刻技术的组合来生产。 牺牲材料用具有对牺牲材料具有破坏性的物质的释放溶液溶解。 该物质还用作电解质，形成具有掺杂结构膜和金属材料作为电极的原电池。 通过包括混合在脱模溶液中的非离子洗涤剂来抑制原电池的影响。

公开(公告)号：US20040113515A1

公开(公告)日：2004-06-17

申请号：US10719177

申请日：2003-11-20

Applicant: PTS Corporation

Inventor： David Miller ,  Lilac Muller ,  Robert L. Anderson

IPC: H02N001/00

CPC classification number: G02B6/352 ,  B81B2201/042 ,  B81C1/00968 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/3564 ,  G02B6/3568 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0841 ,  H02N1/002 ,  H02N1/006

Abstract: A number of methods and systems for overcoming stiction are provided. The systems include electromechanical systems capable of exerting a variety of forces upon areas prone to stiction. The systems can be MEMS arrays or other types of devices where stiction related forces occur. The methods include a variety of ways of causing movement in areas prone to stiction forces. Such movement can be vibrational in nature and is sufficient to overcome stiction, allowing a trapped element to be moveed to a desired location.

Abstract translation: 提供了一些用于克服静摩擦的方法和系统。 这些系统包括能够在容易产生静电的区域上施加各种力的机电系统。 这些系统可以是MEMS阵列或其他类型的器件，其中发生静摩擦力。 这些方法包括在容易产生粘连力的地区引起运动的各种方法。 这种运动本质上可以是振动的，并且足以克服静摩擦，允许被困元件移动到期望的位置。