Apparatus For Rapid Cooling Of Substrates Utilizing A Flat Plate And Cooling Channels

    公开(公告)号:US20170363356A1

    公开(公告)日:2017-12-21

    申请号:US15626719

    申请日:2017-06-19

    IPC分类号: F27D9/00 F27D7/06

    摘要: A vacuum pressure furnace and/or a cooling plate for a vacuum pressure furnace is described, having a cooling channel or tube that selectively circulates a liquid coolant at a reduced temperature. The cooling channel “snakes” back and forth through a target plate assembly to conduct heat from the target plate assembly and back to the coolant. The target plate assembly includes a plurality of clamp members that are screwed over portions of the cooling channel and to a bottom of a plate member of the assembly, enclosing portions of the cooling channel. Thermal sheets or foil are wrapped around the cooling channel, thereby bridging any gaps between the components that may occur during temperature changes due to thermal expansion/contraction.