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公开(公告)号：US20220155072A1
公开(公告)日：2022-05-19
申请号：US17442269
申请日：2020-02-19
摘要： A physical quantity sensor includes a substrate, an anchor portion, a surrounding portion, a detecting element, a moving portion, and a beam portion. The anchor portion is formed on the same side as a principal surface of the substrate and fixed to the substrate. The surrounding portion is formed on the same side as the principal surface of the substrate and surrounds the anchor portion. The detecting element detects a physical quantity as a target of detection. The moving portion is provided with at least a part of the detecting element, formed on the same side as the principal surface of the substrate, and connected to the surrounding portion. The beam portion is formed on the same side as the principal surface of the substrate and connects the anchor portion and the surrounding portion together.
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公开(公告)号：US20240092630A1
公开(公告)日：2024-03-21
申请号：US18263267
申请日：2022-01-17
发明人： Chunzhi DONG , Hiroyuki AIZAWA
IPC分类号： B81B3/00
CPC分类号： B81B3/0021 , B81B2201/0228 , B81B2203/0307 , B81B2203/04
摘要： A capacitive sensor includes at least one support member, a first anchor member, a second anchor member, a first connecting member, and a second connecting member. The first anchor member is fixed to only the first substrate of the first substrate and the second substrate. The second anchor member is fixed to the first substrate and the second substrate. The first connecting member is separate from the first substrate and the second substrate and connects the first anchor member to the movable member. The second connecting member connects the first anchor member to the second anchor member. The first connecting member includes a first elastic member which is elastically deformable. The second connecting member includes at least one second elastic member which is separate from the first substrate and the second substrate and which is elastically deformable.
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