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公开(公告)号：US20220055147A1
公开(公告)日：2022-02-24
申请号：US17378815
申请日：2021-07-19
Inventor： JUN YOKOYAMA , TAKASHI URASHIMA , YOHEI TAKECHI
Abstract: A laser processing apparatus includes a laser oscillator that oscillates processing laser light to be incident on a processing point on a processing surface of a workpiece, a coupling mirror that deflects or transmits the processing laser light and measurement light to be incident on the processing point toward the processing point, a measurement light deflection unit that changes an incident angle of the measurement light on the coupling mirror, a lens that concentrates the processing laser light and the measurement light on the processing point, a controller that controls the laser oscillator and the measurement light deflection unit, a measurement processor that measures a depth of a keyhole generated at the processing point by the processing laser light by using an optical interference signal based on an interference generated by an optical path difference between the measurement light reflected at the processing point and reference light, and a beam position measurement unit that measures positions of the processing laser light and the measurement light.
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公开(公告)号：US20210381818A1
公开(公告)日：2021-12-09
申请号：US17241125
申请日：2021-04-27
Inventor： YOHEI TAKECHI , JUN YOKOYAMA
IPC: G01B9/02
Abstract: OCT measuring device in the present exemplary embodiment includes: wavelength sweep light source that emits light of which a wavelength is swept; optical interferometer that divides the light into measurement light and reference light, emits measurement light toward measurement surface of measuring target object, and generates an optical interference intensity signal indicating an intensity of interference between measurement light reflected from measurement surface and reference light; electro-optic element which is a phase modulator arranged in a light path of optical interferometer; measurement processor which is a signal generator that derives a position of measurement surface and generates a phase amount indicator signal that indicates a phase amount of phase modulator based on the optical interference intensity signal; and electro-optic element controller which is a phase amount controller that controls the phase amount given to the light that is transmitted through phase modulator.
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公开(公告)号：US20210323088A1
公开(公告)日：2021-10-21
申请号：US17214708
申请日：2021-03-26
Inventor： JUN YOKOYAMA , YOHEI TAKECHI
IPC: B23K26/082 , B23K26/064 , B23K26/03
Abstract: A laser processing apparatus sets a processing section passing through a target position on a processing surface, sets a measurement section centered on the target position in the processing section, sets a plurality of data acquisition positions that are trajectories perpendicular to a processing direction in the measurement section. The laser processing apparatus acquires pieces of measurement data indicating shapes of keyholes at the respective data acquisition positions during processing of the processing section, and projects the pieces of measurement data in the processing direction to be superimposed on each other to create projection data. The laser processing apparatus obtains the second instruction value in a direction perpendicular to the processing direction at the target position on the basis of the projection data. Therefore, it is possible to provide a laser processing apparatus and a laser processing method capable of accurately measuring a depth of a keyhole.
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公开(公告)号：US20250035508A1
公开(公告)日：2025-01-30
申请号：US18917559
申请日：2024-10-16
Inventor： JUN YOKOYAMA , TATSUYA YONEMURA , TAKASHI URASHIMA , YOHEI TAKECHI , HIDEYUKI TACHIKA
IPC: G01M11/02
Abstract: At least three light fluxes of the test pattern projected from optical module 1 are acquired by wavefront sensor 9, the parallelism of the respective light fluxes is calculated, and the orientation of display panel 5 of the optical module is adjusted so that the parallelism of each light flux coincides.
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