公开(公告)号：US06548124B1

公开(公告)日：2003-04-15

申请号：US09531036

申请日：2000-03-20

申请人： Paul Brumer ,  Bijoy Dey ,  Moshe Shapiro

发明人： Paul Brumer ,  Bijoy Dey ,  Moshe Shapiro

IPC分类号： C23C800

CPC分类号： G21K1/00 ,  B82B3/00 ,  B82Y30/00 ,  B82Y40/00 ,  C23C14/048 ,  G03F1/78 ,  G03F7/001 ,  G03F7/2051 ,  G03F7/70375 ,  Y10S977/887 ,  Y10S977/89 ,  Y10S977/896 ,  Y10S977/901 ,  Y10S977/951

摘要： A method for the controlled nanometer-scale deposition of molecules on a surface, by means of coherently controlled optical focusing. The coherent control is conveniently performed by inducing a linear superposition of molecular bound states, by means of electromagnetic fields supplied by an applied laser beam. The optical focusing is conveniently performed by passing a beam of such suitably prepared molecules through another electromagnetic field supplied by a standing wave induced by two interacting laser beams. Altering the characteristics of the laser beams alters the forces operating on the molecules, thus directing them to the desired position on the surface. Selection of the frequencies, intensities, and relative phases of the electromagnetic fields, as well as the geometry of the interaction between the molecular beam and the electromagnetic fields, enables deposition of aperiodic molecular patterns on the surface with a resolution of 10 to 15 nanometers. Such nanoscale focusing of molecules by coherent light can be used for executing nanometric molecular lithographic processes.

摘要翻译： 通过相干控制的光学聚焦在表面上对分子进行受控纳米级沉积的方法。 通过利用施加的激光束提供的电磁场，通过诱导分子结合状态的线性叠加来方便地执行相干控制。 通过将这种适当制备的分子的束通过由由两个相互作用的激光束引起的驻波提供的另一电磁场来方便地执行光聚焦。 改变激光束的特性改变在分子上作用的力，从而将它们引导到表面上的期望位置。 电磁场的频率，强度和相对相位的选择以及分子束和电磁场之间的相互作用的几何形状使得能够以10至15纳米的分辨率在表面上沉积非周期性分子图案。 通过相干光的分子的这种纳米尺度聚焦可以用于执行纳米分子光刻过程。