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公开(公告)号：US20110100209A1
公开(公告)日：2011-05-05
申请号：US12760843
申请日：2010-04-15
IPC分类号： B01D53/04
CPC分类号： B01D53/0462 , B01D53/565 , B01D53/685 , B01D2253/108 , B01D2256/26 , B01D2257/2045 , B01D2257/402 , B01D2257/504 , B01D2257/80 , B01D2258/0216 , B01D2259/40056 , B01D2259/4006 , B01D2259/402 , Y02C10/08 , Y02C20/10
摘要： During the conventional temperature swing adsorption (TSA) process, NF3 co-adsorbed with the impurities is vented during regeneration. This invention is a novel TSA cycle in which the co-adsorbed NF3 is recovered. In this novel TSA cycle, a control scheme is used to stop the adsorption prior to the saturation of the adsorber with impurities and use a recovery purge gas (either co-current or counter-current) to release the co-adsorbed NF3 off the saturated adsorber. The effluent of the inert purge gas can be combined with the effluent of the on-stream vessel or can be recycled to the feed of the on-stream vessel. 10%-100% of the co-adsorbed NF3 is recovered and made available as product in this novel TSA cycle. Thus the overall process yield of NF3 is increased. The removing of the co-adsorbed NF3 from the adsorber also prevents adsorber degradation thus prolonging the useful life of the adsorber.
摘要翻译： 在传统的变温吸附（TSA）过程中，在再生期间与杂质共吸附的NF3被排出。 本发明是一种新的TSA循环，其中回收了共吸附的NF3。 在这种新的TSA循环中，使用控制方案在吸附剂饱和之前停止吸附，并使用回收吹扫气体（或者是电流或逆流）来释放饱和吸附的NF3。 吸附剂。 惰性吹扫气体的流出物可以与流动容器的流出物组合，或者可以再循环到流动容器的进料中。 共同吸附的NF3的10％-100％被回收，并在本新型TSA循环中作为产品获得。 因此，NF3的整体加工产率增加。 从吸附器除去共吸附的NF3也可以防止吸附剂的降解，从而延长吸附器的使用寿命。
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公开(公告)号：US08404024B2
公开(公告)日：2013-03-26
申请号：US12760843
申请日：2010-04-15
IPC分类号： B01D59/26
CPC分类号： B01D53/0462 , B01D53/565 , B01D53/685 , B01D2253/108 , B01D2256/26 , B01D2257/2045 , B01D2257/402 , B01D2257/504 , B01D2257/80 , B01D2258/0216 , B01D2259/40056 , B01D2259/4006 , B01D2259/402 , Y02C10/08 , Y02C20/10
摘要： During the conventional temperature swing adsorption (TSA) process, NF3 co-adsorbed with the impurities is vented during regeneration. This invention is a novel TSA cycle in which the co-adsorbed NF3 is recovered. In this novel TSA cycle, a control scheme is used to stop the adsorption prior to the saturation of the adsorber with impurities and use a recovery purge gas (either co-current or counter-current) to release the co-adsorbed NF3 off the saturated adsorber. The effluent of the inert purge gas can be combined with the effluent of the on-stream vessel or can be recycled to the feed of the on-stream vessel. 10%-100% of the co-adsorbed NF3 is recovered and made available as product in this novel TSA cycle. Thus the overall process yield of NF3 is increased. The removing of the co-adsorbed NF3 from the adsorber also prevents adsorber degradation thus prolonging the useful life of the adsorber.
摘要翻译： 在传统的变温吸附（TSA）过程中，在再生期间与杂质共吸附的NF3被排出。 本发明是一种新的TSA循环，其中回收了共吸附的NF3。 在这种新型的TSA循环中，使用控制方案在吸附剂饱和之前停止吸附，并使用回收吹扫气体（或者是电流或逆流）来释放饱和吸附的NF3。 吸附剂。 惰性吹扫气体的流出物可以与流动容器的流出物组合，或者可以再循环到流动容器的进料中。 共同吸附的NF3的10％-100％被回收，并在本新型TSA循环中作为产品获得。 因此，NF3的总工艺产量增加。 从吸附器除去共吸附的NF3也可以防止吸附剂的降解，从而延长吸附器的使用寿命。
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