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公开(公告)号：US20110100209A1
公开(公告)日：2011-05-05
申请号：US12760843
申请日：2010-04-15
IPC分类号： B01D53/04
CPC分类号： B01D53/0462 , B01D53/565 , B01D53/685 , B01D2253/108 , B01D2256/26 , B01D2257/2045 , B01D2257/402 , B01D2257/504 , B01D2257/80 , B01D2258/0216 , B01D2259/40056 , B01D2259/4006 , B01D2259/402 , Y02C10/08 , Y02C20/10
摘要： During the conventional temperature swing adsorption (TSA) process, NF3 co-adsorbed with the impurities is vented during regeneration. This invention is a novel TSA cycle in which the co-adsorbed NF3 is recovered. In this novel TSA cycle, a control scheme is used to stop the adsorption prior to the saturation of the adsorber with impurities and use a recovery purge gas (either co-current or counter-current) to release the co-adsorbed NF3 off the saturated adsorber. The effluent of the inert purge gas can be combined with the effluent of the on-stream vessel or can be recycled to the feed of the on-stream vessel. 10%-100% of the co-adsorbed NF3 is recovered and made available as product in this novel TSA cycle. Thus the overall process yield of NF3 is increased. The removing of the co-adsorbed NF3 from the adsorber also prevents adsorber degradation thus prolonging the useful life of the adsorber.
摘要翻译： 在传统的变温吸附（TSA）过程中，在再生期间与杂质共吸附的NF3被排出。 本发明是一种新的TSA循环，其中回收了共吸附的NF3。 在这种新的TSA循环中，使用控制方案在吸附剂饱和之前停止吸附，并使用回收吹扫气体（或者是电流或逆流）来释放饱和吸附的NF3。 吸附剂。 惰性吹扫气体的流出物可以与流动容器的流出物组合，或者可以再循环到流动容器的进料中。 共同吸附的NF3的10％-100％被回收，并在本新型TSA循环中作为产品获得。 因此，NF3的整体加工产率增加。 从吸附器除去共吸附的NF3也可以防止吸附剂的降解，从而延长吸附器的使用寿命。
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公开(公告)号：US08404024B2
公开(公告)日：2013-03-26
申请号：US12760843
申请日：2010-04-15
IPC分类号： B01D59/26
CPC分类号： B01D53/0462 , B01D53/565 , B01D53/685 , B01D2253/108 , B01D2256/26 , B01D2257/2045 , B01D2257/402 , B01D2257/504 , B01D2257/80 , B01D2258/0216 , B01D2259/40056 , B01D2259/4006 , B01D2259/402 , Y02C10/08 , Y02C20/10
摘要： During the conventional temperature swing adsorption (TSA) process, NF3 co-adsorbed with the impurities is vented during regeneration. This invention is a novel TSA cycle in which the co-adsorbed NF3 is recovered. In this novel TSA cycle, a control scheme is used to stop the adsorption prior to the saturation of the adsorber with impurities and use a recovery purge gas (either co-current or counter-current) to release the co-adsorbed NF3 off the saturated adsorber. The effluent of the inert purge gas can be combined with the effluent of the on-stream vessel or can be recycled to the feed of the on-stream vessel. 10%-100% of the co-adsorbed NF3 is recovered and made available as product in this novel TSA cycle. Thus the overall process yield of NF3 is increased. The removing of the co-adsorbed NF3 from the adsorber also prevents adsorber degradation thus prolonging the useful life of the adsorber.
摘要翻译： 在传统的变温吸附（TSA）过程中，在再生期间与杂质共吸附的NF3被排出。 本发明是一种新的TSA循环，其中回收了共吸附的NF3。 在这种新型的TSA循环中，使用控制方案在吸附剂饱和之前停止吸附，并使用回收吹扫气体（或者是电流或逆流）来释放饱和吸附的NF3。 吸附剂。 惰性吹扫气体的流出物可以与流动容器的流出物组合，或者可以再循环到流动容器的进料中。 共同吸附的NF3的10％-100％被回收，并在本新型TSA循环中作为产品获得。 因此，NF3的总工艺产量增加。 从吸附器除去共吸附的NF3也可以防止吸附剂的降解，从而延长吸附器的使用寿命。
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公开(公告)号：US20080289660A1
公开(公告)日：2008-11-27
申请号：US11752606
申请日：2007-05-23
IPC分类号： B08B3/10
CPC分类号： H01L21/02052 , H01L21/02057
摘要： This invention is directed to an improvement in a wet chemical process for producing electronic precursors. In such process a silicon surface is treated with a wet chemical and the wet chemical subsequently removed therefrom by contact with a drying vapor. In this case, the improvement in the process comprises: employing a drying vapor comprised of isopropanol; and, maintaining the isopropanol employed in said drying vapor at a temperature below about 80° F. prior to forming said drying vapor. Preferably the isopropanol is maintained free from exposure to light from the time of manufacture to the time of use.
摘要翻译： 本发明涉及用于生产电子前体的湿化学方法的改进。 在这种过程中，硅表面用湿化学品处理，随后通过与干燥蒸气接触从其中除去湿化学物质。 在这种情况下，该方法的改进包括：使用由异丙醇构成的干燥蒸气; 并且在形成所述干燥蒸气之前将所述干燥蒸气中使用的异丙醇保持在低于约80°F的温度。 优选地，异丙醇在制造时至使用时保持不受光照影响。
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