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公开(公告)号:US20230131413A1
公开(公告)日:2023-04-27
申请号:US17044850
申请日:2020-05-08
Applicant: Photo electron Soul Inc.
Inventor: Atsushi KOIZUMI , Hokuto IIJIMA
IPC: H01J37/073 , H01J37/063
Abstract: The present disclosure addresses the problem of providing an electron gun that can directly monitor an intensity of an electron beam emitted from a photocathode using only the configuration provided to the electron gun, an electron beam applicator equipped with an electron gun, and a method for controlling an electron gun.
The aforementioned problem can be solved by an electron gun comprising a light source, a photocathode that emits an electron beam in response to receiving light from the light source, an anode, an electron-beam-shielding member with which it is possible to shield part of the electron beam, and a measurement unit that measures the intensity of the electron beam emitted from the photocathode using a measurement electron beam shielded by the electron-beam-shielding member.