公开(公告)号：US09202821B2

公开(公告)日：2015-12-01

申请号：US14061415

申请日：2013-10-23

Applicant: Pixtronix, Inc.

Inventor： Patrick F. Brinkley ,  Wilhelmus A. De Groot ,  Jasper L. Steyn ,  Elif Selin Mungan

IPC: H01L27/12 ,  H01L29/66 ,  H01L29/786 ,  B81C1/00 ,  G02B26/02

CPC classification number: H01L27/1218 ,  B81B2207/015 ,  B81C1/00246 ,  B81C2203/0742 ,  B81C2203/0778 ,  G02B26/023 ,  H01L27/1255 ,  H01L29/6675 ,  H01L29/78603 ,  H01L29/78642

Abstract: This disclosure provides systems, methods and apparatus for forming electromechanical systems (EMS) displays where the area of a substrate occupied by a pixel circuit can be reduced if portions of the pixel circuit can be built in three dimensions. In some aspects, certain EMS displays can incorporate structures that are substantially normal to the surface of a substrate. Incorporating circuit components, such as transistors, into such structures, can reduce the area they occupy within the plane of the substrate. In some aspects, the components of a transistor can be fabricated directly into a MEMS anchor that supports a light modulator or a portion of an actuator over the substrate. In some other aspects, the transistor can be fabricated on one or more sidewalls of any MEMS structure.

Abstract translation: 本公开提供了用于形成机电系统（EMS）显示器的系统，方法和装置，其中像素电路占据的基板的面积可以减小，如果像素电路的部分可以被构建在三维中。 在一些方面，某些EMS显示器可以结合基本上垂直于基底表面的结构。 将诸如晶体管的电路组件结合到这种结构中可以减少它们在衬底的平面内占据的面积。 在一些方面，晶体管的部件可以直接制造成支撑光调制器或致动器的一部分在衬底上的MEMS锚。 在一些其他方面，晶体管可以制造在任何MEMS结构的一个或多个侧壁上。

公开(公告)号：US20150108479A1

公开(公告)日：2015-04-23

申请号：US14061415

申请日：2013-10-23

Applicant: Pixtronix, Inc.

Inventor： Patrick F. Brinkley ,  Wilhelmus A. De Groot ,  Jasper L. Steyn ,  Elif Selin Mungan

IPC: H01L27/12 ,  H01L29/66 ,  H01L29/786

CPC classification number: H01L27/1218 ,  B81B2207/015 ,  B81C1/00246 ,  B81C2203/0742 ,  B81C2203/0778 ,  G02B26/023 ,  H01L27/1255 ,  H01L29/6675 ,  H01L29/78603 ,  H01L29/78642

Abstract: This disclosure provides systems, methods and apparatus for forming electromechanical systems (EMS) displays where the area of a substrate occupied by a pixel circuit can be reduced if portions of the pixel circuit can be built in three dimensions. In some aspects, certain EMS displays can incorporate structures that are substantially normal to the surface of a substrate. Incorporating circuit components, such as transistors, into such structures, can reduce the area they occupy within the plane of the substrate. In some aspects, the components of a transistor can be fabricated directly into a MEMS anchor that supports a light modulator or a portion of an actuator over the substrate. In some other aspects, the transistor can be fabricated on one or more sidewalls of any MEMS structure.

Abstract translation: 本公开提供了用于形成机电系统（EMS）显示器的系统，方法和装置，其中像素电路占据的基板的面积可以减小，如果像素电路的部分可以被构建在三维中。 在一些方面，某些EMS显示器可以结合基本上垂直于基底表面的结构。 将诸如晶体管的电路组件结合到这种结构中可以减少它们在衬底的平面内占据的面积。 在一些方面，晶体管的部件可以直接制造成支撑光调制器或致动器的一部分在衬底上的MEMS锚。 在一些其他方面，晶体管可以制造在任何MEMS结构的一个或多个侧壁上。