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公开(公告)号:US09689820B2
公开(公告)日:2017-06-27
申请号:US14353713
申请日:2012-10-25
Applicant: Purdue Research Foundation
Inventor: James Michael Caruthers , Douglas E. Adams , Anand David , Peter R. O'Regan , Farshid Sadeghi , Nathan Daniel Sharp , Mark David Suchomel
IPC: G01N25/72 , H01M10/04 , H01M10/0525 , H01M10/058 , H01M10/34
CPC classification number: G01N25/72 , H01M10/0413 , H01M10/0436 , H01M10/0525 , H01M10/058 , H01M10/345
Abstract: Methods and apparatus for the detection of irregularities in a thin film by measurement of transient thermal response.