DIGITAL CURRENT MEASUREMENT FOR IN-SITU DEVICE MONITORING

    公开(公告)号:US20190107569A1

    公开(公告)日:2019-04-11

    申请号:US15730486

    申请日:2017-10-11

    Abstract: Aspects of the disclosure includes a transistor-under-test (TUT) to charge/discharge a capacitor; changing an oscillation state when a capacitor voltage crosses a threshold and turning OFF the TUT; discharging the capacitor using the TUT; commencing precharging the capacitor after detecting the capacitor reaches a transition voltage; commencing discharging the capacitor after a precharger time delay; sustaining a relaxation oscillator waveform, wherein the relaxation oscillator waveform is based on turning OFF/ON the TUT; and generating a digital representation of a TUT current associated with a relaxation oscillator period of the relaxation oscillator waveform. For example, a measurement tile includes a pulse generator to sustain the relaxation oscillator waveform with the relaxation oscillator period associated with an inverse TUT current; and a precharger charging a capacitor and the TUT charging/discharging the capacitor, wherein the relaxation oscillator waveform is based on turning OFF/ON the TUT in accordance with discharging and charging the capacitor.

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