EEPROM DEVICE WITH BOTTOM GATE STRUCTURE

    公开(公告)号:US20210257488A1

    公开(公告)日:2021-08-19

    申请号:US16792384

    申请日:2020-02-17

    Abstract: Certain aspects of the present disclosure generally relate to electrically erasable programmable read-only memory (EEPROM) device comprising at least one EEPROM cell structure. The EEPROM device generally includes a first active region, a second active region, a channel region disposed between the first active region and the second active region, a floating gate structure disposed above the channel region and separated from the channel region by a first dielectric layer, a control gate structure disposed above the floating gate structure and separated from the floating gate structure by a second dielectric layer, and a bottom gate structure disposed below the channel region.

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