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公开(公告)号:US20200291520A1
公开(公告)日:2020-09-17
申请号:US16890875
申请日:2020-06-02
申请人: RASIRC, Inc.
发明人: Richard D. Blethen , Jeffrey J. Spiegelman , Russell J. Holmes , Daniel Alvarez, Jr. , Jian Yang , Ericca Lynne Speed
IPC分类号: C23C16/455 , C09K13/00 , F17C11/00
摘要: Provided herein are methods, systems, and devices incorporating use of materials to store, ship, and deliver process gases to micro-electronics fabrication processes and other critical process applications.
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公开(公告)号:US11635170B2
公开(公告)日:2023-04-25
申请号:US16764308
申请日:2018-11-16
申请人: RASIRC, Inc.
发明人: Richard D. Blethen , Jeffrey J. Spiegelman , Russell J. Holmes , Daniel Alvarez, Jr. , Jian Yang , Ericca Lynne Speed
摘要: Provided herein are methods, systems, and devices incorporating use of materials to store, ship, and deliver process gases to micro-electronics fabrication processes and other critical process applications.
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公开(公告)号:US11634816B2
公开(公告)日:2023-04-25
申请号:US16890875
申请日:2020-06-02
申请人: RASIRC, Inc.
发明人: Richard D. Blethen , Jeffrey J. Spiegelman , Russell J. Holmes , Daniel Alvarez, Jr. , Jian Yang , Ericca Lynne Speed
摘要: Provided herein are methods, systems, and devices incorporating use of materials to store, ship, and deliver process gases to micro-electronics fabrication processes and other critical process applications.
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公开(公告)号:US11634815B2
公开(公告)日:2023-04-25
申请号:US16880184
申请日:2020-05-21
申请人: RASIRC, Inc.
发明人: Richard D. Blethen , Jeffrey J. Spiegelman , Russell J. Holmes , Daniel Alvarez, Jr. , Jian Yang , Ericca Lynne Speed
摘要: Provided herein are methods, systems, and devices incorporating use of materials to store, ship, and deliver process gases to micro-electronics fabrication processes and other critical process applications.
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公开(公告)号:US20200291517A1
公开(公告)日:2020-09-17
申请号:US16880184
申请日:2020-05-21
申请人: RASIRC, Inc.
发明人: Richard D. Blethen , Jeffrey J. Spiegelman , Russell J. Holmes , Daniel Alvarez, JR. , Jian Yang , Ericca Lynne Speed
IPC分类号: C23C16/455 , C08K5/14 , C08L71/02 , C08L27/18 , C09K13/00
摘要: Provided herein are methods, systems, and devices incorporating use of materials to store, ship, and deliver process gases to micro-electronics fabrication processes and other critical process applications.
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