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公开(公告)号：US09958771B2
公开(公告)日：2018-05-01
申请号：US15190793
申请日：2016-06-23
申请人： Rave LLC
CPC分类号： G03F1/64 , G03F7/70983
摘要： A method and apparatus for removing a pellicle from a photomask wherein the adhesive between the pellicle frame and photomask is cooled sufficiently to allow the adhesive property of the adhesive to diminish to the point where the adhesive will release from the photomask with little or no mechanical force and leaving minimal adhesive on the photomask. The adhesive is cooled by way of manifolds containing coolant being brought in contact with the pellicle frame or by way of a coolant spray nozzles spraying coolant directly onto the pellicle frame.
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公开(公告)号：US20170189945A1
公开(公告)日：2017-07-06
申请号：US15400143
申请日：2017-01-06
申请人： RAVE LLC
CPC分类号： B08B7/0042 , G03F1/82 , G03F1/84 , Y10S134/902
摘要： Method and apparatus for identifying a contaminant on a substrate. Identification of a contaminant removed from a substrate can be useful in identifying and eliminating or reducing the source of the contamination and tailoring the removal method to minimize the potential for substrate damage. The methods and apparatus for identification of the contaminant provide liberation of molecules of the contaminant from the surface of the substrate, accounting for different geometries and substrate materials, sample preparation, and chemical analysis of the contaminant.
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公开(公告)号：US10409154B2
公开(公告)日：2019-09-10
申请号：US15960733
申请日：2018-04-24
申请人： RAVE LLC
摘要： A method and apparatus for removing a pellicle from a photomask wherein the adhesive between the pellicle frame and photomask is cooled sufficiently to allow the adhesive property of the adhesive to diminish to the point where the adhesive will release from the photomask with little or no mechanical force and leaving minimal adhesive on the photomask. The adhesive is cooled by way of manifolds containing coolant being brought in contact with the pellicle frame or by way of a coolant spray nozzles spraying coolant directly onto the pellicle frame.
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公开(公告)号：US20180239243A1
公开(公告)日：2018-08-23
申请号：US15960733
申请日：2018-04-24
申请人： RAVE LLC
摘要： A method and apparatus for removing a pellicle from a photomask wherein the adhesive between the pellicle frame and photomask is cooled sufficiently to allow the adhesive property of the adhesive to diminish to the point where the adhesive will release from the photomask with little or no mechanical force and leaving minimal adhesive on the photomask. The adhesive is cooled by way of manifolds containing coolant being brought in contact with the pellicle frame or by way of a coolant spray nozzles spraying coolant directly onto the pellicle frame.
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