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公开(公告)号：US3105906A
公开(公告)日：1963-10-01
申请号：US85503959
申请日：1959-11-24
Applicant: RCA CORP
Inventor： SCHULTZ MELVIN L , HARTY WILLIAM E
CPC classification number: G01J5/061 , F17C3/085 , F17C2270/0518 , H01L21/00
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