公开(公告)号：US3762968A

公开(公告)日：1973-10-02

申请号：US3762968D

申请日：1971-04-07

Applicant: RCA CORP

Inventor： KRESSEL H ,  NELSON H

IPC: H01L21/225 ,  H01L7/38

CPC classification number: H01L21/2258 ,  Y10S252/95 ,  Y10S438/912

Abstract: A body of single crystalline gallium arsenide or aluminum gallium arsenide containing a relatively low concentration of aluminum is coated by liquid phase epitaxy with a layer of aluminum gallium arsenide containing a relatively high concentration of aluminum. The aluminum gallium arsenide layer has therein a desired conductivity modifier. The coated body is heated to diffuse the conductivity modifier from the layer into the body to form a region of a desired conductivity along the surface of the body. At least a portion of the layer is etched away with an etchant which does not attack the material of the body, such as boiling hydrochloric acid, to expose at least a portion of the surface of the body.