Particle counter for chemical solution

    公开(公告)号:US09823190B2

    公开(公告)日:2017-11-21

    申请号:US14859780

    申请日:2015-09-21

    Applicant: RION CO., LTD.

    Abstract: A particle counter for chemical solution in this disclosure uses a flow cell through which a chemical solution including particles flows, a laser light, and a light-receiving element array. Scattered light from the particles passing through a detection region on an optical path of the laser light in the flow cell is condensed to the light-receiving element array. The laser light in the center of the detection region has an energy density of 3×108 mW/cm2 or more. Each of plural light-receiving elements (a) is larger in length and width than a spot diameter of the scattered light, and (b) receives the scattered light from a region with a size of 760 μm2 or less included in the detection region. The signal processing unit counts the particles passing through the detection region by use of a threshold corresponding to the smallest measurable particle size of 0.03 μm.

    Particle counter
    2.
    发明授权

    公开(公告)号:US11262284B2

    公开(公告)日:2022-03-01

    申请号:US16747286

    申请日:2020-01-20

    Applicant: RION Co., Ltd.

    Abstract: A particle counter includes: a multi-flow cell with flow passages arrayed in a first direction and having a section including a detection region, for detecting a particle, formed when the flow passage is irradiated with irradiation light; a light receiving optical system configured to receive emitted light generated from a particle contained in sample fluid flowing in the at least one flow passage and passing through the detection region; an optical axis moving unit configured to move an optical axis of the irradiation light and an optical axis of the emitted light in the first direction; and a counter configured to count the particle for each particle size based on an intensity of the emitted light.

    In-fluid floating substance measurement flow cell and particle counter

    公开(公告)号:US11009445B2

    公开(公告)日:2021-05-18

    申请号:US16749322

    申请日:2020-01-22

    Applicant: RION Co., Ltd.

    Abstract: An in-fluid floating substance measurement flow cell includes: a main body having at least a predetermined portion made of a material having translucency; and a flow passage formed inside the main body, having both end openings at an outer surface of the main body in a substantially identical direction, and configured such that fluid flows in the flow passage. The flow passage has a predetermined section arranged between two opposing flat wall surfaces facing each other, and the predetermined portion includes the predetermined section.

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