IN-FLUID FLOATING SUBSTANCE MEASUREMENT FLOW CELL AND PARTICLE COUNTER

    公开(公告)号:US20200240893A1

    公开(公告)日:2020-07-30

    申请号:US16749322

    申请日:2020-01-22

    申请人: RION Co., Ltd.

    IPC分类号: G01N15/14

    摘要: An in-fluid floating substance measurement flow cell includes: a main body having at least a predetermined portion made of a material having translucency; and a flow passage formed inside the main body, having both end openings at an outer surface of the main body in a substantially identical direction, and configured such that fluid flows in the flow passage. The flow passage has a predetermined section arranged between two opposing flat wall surfaces facing each other, and the predetermined portion includes the predetermined section.

    PARTICLE COUNTER
    2.
    发明申请
    PARTICLE COUNTER 审中-公开

    公开(公告)号:US20200240890A1

    公开(公告)日:2020-07-30

    申请号:US16747286

    申请日:2020-01-20

    申请人: RION Co., Ltd.

    IPC分类号: G01N15/02 G01N21/53

    摘要: A particle counter includes: a multi-flow cell with flow passages arrayed in a first direction and having a section including a detection region, for detecting a particle, formed when the flow passage is irradiated with irradiation light; a light receiving optical system configured to receive emitted light generated from a particle contained in sample fluid flowing in the at least one flow passage and passing through the detection region; an optical axis moving unit configured to move an optical axis of the irradiation light and an optical axis of the emitted light in the first direction; and a counter configured to count the particle for each particle size based on an intensity of the emitted light.

    PARTICLE COUNTER FOR CHEMICAL SOLUTION
    3.
    发明申请
    PARTICLE COUNTER FOR CHEMICAL SOLUTION 有权
    化学溶液颗粒计数器

    公开(公告)号:US20160091407A1

    公开(公告)日:2016-03-31

    申请号:US14859780

    申请日:2015-09-21

    申请人: RION CO., LTD.

    IPC分类号: G01N15/02 G01N21/53

    摘要: A particle counter for chemical solution in this disclosure uses a flow cell through which a chemical solution including particles flows, a laser light, and a light-receiving element array. Scattered light from the particles passing through a detection region on an optical path of the laser light in the flow cell is condensed to the light-receiving element array. The laser light in the center of the detection region has an energy density of 3×108 mW/cm2 or more. Each of plural light-receiving elements (a) is larger in length and width than a spot diameter of the scattered light, and (b) receives the scattered light from a region with a size of 760 μm2 or less included in the detection region. The signal processing unit counts the particles passing through the detection region by use of a threshold corresponding to the smallest measurable particle size of 0.03 μm.

    摘要翻译: 本公开的化学溶液的颗粒计数器使用流动池,包括颗粒的化学溶液流过该流动池,激光和受光元件阵列。 来自通过流通池中的激光的光路上的检测区域的颗粒的散射光被聚光到受光元件阵列。 检测区域的中心的激光的能量密度为3×108mW / cm 2以上。 多个光接收元件(a)中的每一个的长度和宽度比散射光的光斑直径大,并且(b)接收来自检测区域中包括的尺寸为760μm2以下的区域的散射光。 信号处理单元通过使用对应于最小可测量粒径为0.03μm的阈值对通过检测区域的颗粒进行计数。