公开(公告)号：US20070292244A1

公开(公告)日：2007-12-20

申请号：US11424461

申请日：2006-06-15

申请人： ROBERT B. MOORE ,  Eric Ruhland ,  Satish Sundar ,  Mario David Silvetti

发明人： ROBERT B. MOORE ,  Eric Ruhland ,  Satish Sundar ,  Mario David Silvetti

IPC分类号： H01L21/677

CPC分类号： H01L21/67742 ,  H01L21/67201 ,  Y10S414/135 ,  Y10T29/49826

摘要： A new apparatus for processing substrates is disclosed. A multi-level load lock chamber having four environmentally isolated chambers interfaces with a transfer chamber that has a robotic assembly. The robotic assembly has two arms that each can move horizontally as the robotic assembly rotates about its axis. The arms can reach into the isolated chambers of the load lock to receive substrates from the bottom isolated chambers, transport the substrates to process chambers, and then place the substrates in the upper chambers. The isolated chambers in the load lock chamber may have a pivotably attached lid that may be opened to access the inside of the isolated chambers.

摘要翻译： 公开了一种用于处理衬底的新设备。 具有四个环境隔离室的多级装载锁定室与具有机器人组件的传送室接口。 机器人组件具有两个臂，每个臂可随着机器人组件围绕其轴旋转而水平移动。 臂可以到达负载锁的隔离室，以从底部隔离室接收衬底，将衬底输送到处理室，然后将衬底放置在上腔室中。 负载锁定室中的隔离室可以具有可枢转地连接的盖，其可以打开以进入隔离室的内部。