公开(公告)号：US10404232B2

公开(公告)日：2019-09-03

申请号：US15029433

申请日：2014-09-30

Applicant: ROYAL MELBOURNE INSTITUTE OF TECHNOLOGY

Inventor： Amgad Rezk ,  Leslie Yeo ,  James Friend

IPC: H01L41/09 ,  H01L41/047 ,  H03H9/25 ,  B01L3/00 ,  B05B17/06 ,  H02N2/16

Abstract: A piezoelectric actuation platform (1) including piezoelectric substrate (3) formed from a single crystal piezoelectric material, and at least one simple electrode (5) in contact with the piezoelectric substrate for applying an electrical signal to the substrate such that a lamb or surface acoustic wave can be generated within said substrate.