Automated semiconductor immersion processing system

    公开(公告)号:US06575689B2

    公开(公告)日:2003-06-10

    申请号:US10159879

    申请日:2002-05-29

    IPC分类号: B65B2102

    摘要: A process system for processing semiconductor wafers includes a stocker module, and immersion module, and a process module. A process robot moves on a lateral rail to transfer wavers between the modules. The immersion module is separated from the other modules, to avoid transmission of vibration. Immersion tanks are radially positioned within the immersion module, to provide a compact design. An immersion robot moves batches of wafers on an end effector between the immersion tanks. The end effector may be detachable from the immersion robot, so that the immersion robot can move a second batch of wafers, while the first batch of wafers undergoes an immersion process.

    Automated semiconductor immersion processing system
    2.
    发明授权
    Automated semiconductor immersion processing system 有权
    自动半导体浸没处理系统

    公开(公告)号:US06439824B1

    公开(公告)日:2002-08-27

    申请号:US09611507

    申请日:2000-07-07

    IPC分类号: B65B2102

    摘要: A process system for processing semiconductor wafers includes a stocker module, and immersion module, and a process module. A process robot moves on a lateral rail to transfer wavers between the modules. The immersion module is separated from the other modules, to avoid transmission of vibration. Immersion tanks are radially positioned within the immersion module, to provide a compact design. An immersion robot moves batches of wafers on an end effector between the immersion tanks. The end effector may be detachable from the immersion robot, so that the immersion robot can move a second batch of wafers, while the first batch of wafers undergoes an immersion process.

    摘要翻译: 用于处理半导体晶片的处理系统包括储料器模块和浸没模块以及处理模块。 过程机器人在横向轨道上移动以在模块之间传递波浪。 浸没模块与其他模块分离,以避免振动传播。 沉浸池径向定位在浸没模块内,以提供紧凑的设计。 浸没式机器人在浸没池之间的端部执行器上移动批次的晶片。 末端执行器可以从浸没机器人脱离,使得浸没式机器人可以移动第二批晶片,同时第一批晶片经历浸没过程。

    Disk preconditioning apparatus and related method
    8.
    发明授权
    Disk preconditioning apparatus and related method 有权
    磁盘预处理装置及相关方法

    公开(公告)号:US08009403B1

    公开(公告)日:2011-08-30

    申请号:US11523357

    申请日:2006-09-19

    IPC分类号: H01F13/00 H01H47/00

    CPC分类号: G11B5/0245 G11B5/84

    摘要: An apparatus and method for preconditioning a magnetic recording disk is provided in which two substantially identical, but opposing, pancake coils are disposed generally parallel to one another with a gap therebetween into which a disk to be preconditioned is inserted. A large pulse of current is delivered to the coils to generate a magnetic field that is sufficiently strong to precondition the disk. The radial fields of each respective pancake coil add together in the gap where the disk is located, and the field presets both the data layer and the hard bias layer of the SUL. Outside of the gap region, the fields cancel one another such that there are essentially no perpendicular fields due to the symmetry of the coils, such that there is very little net residual perpendicular magnetization when the disk is removed from the gap. An electrical circuit for producing the current pulse is provided. An aluminum support structure provides thermal management and magnetic flux conductivity for the system.

    摘要翻译: 提供了一种用于预处理磁记录盘的装置和方法,其中两个基本相同但相对的煎饼线圈大体上彼此平行设置,其间具有间隙,待预处理的盘被插入到该间隙中。 将大的电流脉冲传送到线圈以产生足够强的磁场以预处理磁盘。 每个相应的煎饼线圈的径向场在盘所在的间隙中加在一起,并且场预设SUL的数据层和硬偏置层。 在间隙区域之外,场相互抵消,使得由于线圈的对称性基本上不存在垂直场,使得当盘从间隙移除时,非常少的净残余垂直磁化强度。 提供用于产生电流脉冲的电路。 铝支撑结构为系统提供热管理和磁通量传导。

    Absorber tower metal hood to concrete shell attachment
    9.
    发明授权
    Absorber tower metal hood to concrete shell attachment 失效
    吸收塔金属罩与混凝土壳附件

    公开(公告)号:US07707782B2

    公开(公告)日:2010-05-04

    申请号:US11055760

    申请日:2005-02-10

    IPC分类号: E04D13/00 E04D1/34 B62D63/04

    摘要: An assembly and method for facilitating the attachment of a metal alloy hood to the concrete shell of a spray absorber tower, and compensating for relative radial thermal expansion of the hood and the shell during start up, shut down, and operation of the spray absorber tower, while also providing accurate and effective distribution of shear forces circumferentially along a horizontal plane from the metal alloy hood to anchor rods partially embedded in the concrete shell of the spray absorber tower.

    摘要翻译: 一种用于促进将金属合金罩附接到喷雾吸收塔的混凝土壳体的组件和方法,并且补偿喷雾吸收塔的启动,关闭和操作期间罩和壳的相对径向热膨胀 同时还提供沿着水平面从金属合金罩到部分地嵌入在喷雾吸收塔的混凝土壳体中的锚杆的周向剪切力的准确和有效的分布。

    Electrical splice assembly
    10.
    发明申请
    Electrical splice assembly 有权
    电接头组装

    公开(公告)号:US20070246241A1

    公开(公告)日:2007-10-25

    申请号:US11406622

    申请日:2006-04-19

    IPC分类号: H01R9/05

    摘要: An electrical splice assembly includes a bus plate having a plurality of coplanar, spaced male blades extending from the bus plate in cantilever fashion, a plurality of female terminals attached to the male blades, and a generally U-shaped housing of extrudable shape. The housing has an elongate open end portion defining a terminal receiving cavity, a closed end portion and an intermediate portion defining a slot that communicates with the terminal receiving cavity. The bus plate is at least partially disposed in the slot and the spaced male blades are at least partially disposed in the terminal receiving cavity along with the female terminals attached to them. The bus plate is a sheet metal stamping and the housing is an extrusion. The female terminals are attached to selected ones of the male blades to form a sub-assembly that is inserted laterally into the housing so the bus plate is at least partially disposed in the slot and the female terminals are disposed in the terminal receiving cavity. During manufacture a bus plate of appropriate length may be severed from a long sheet metal bus plate precursor and a housing of appropriate length may be severed from a long extruded housing precursor.

    摘要翻译: 电接头组件包括总线板,该总线板具有多个共面的间隔开的阳片,从悬臂式总线板延伸,多个阴端子连接到阳片上,以及大体呈U形的可挤出形状的外壳。 壳体具有限定端子容纳腔的细长开口端部分,封闭端部和限定与端子容纳腔连通的槽的中间部分。 总线板至少部分地设置在槽中,并且间隔开的阳叶片与附接到它们的阴端子一起至少部分地设置在端子容纳腔中。 母板是钣金冲压件,外壳是挤压件。 阴端子连接到所选择的阳片中以形成横向插入壳体中的子组件,使得总线板至少部分地设置在槽中,并且阴端子设置在端子容纳腔中。 在制造期间,可以从长的金属板总成板前体切断适当长度的总线板,并且可以从长的挤压外壳前体切断适当长度的外壳。