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公开(公告)号：US6122103A
公开(公告)日：2000-09-19
申请号：US337970
申请日：1999-06-22
CPC分类号： G02B5/3058 , G02B5/1809
摘要： A broadband wire grid polarizer for the visible spectrum has a plurality of elongated elements supported on a substrate. A region having a lower refractive index than the refractive index of the substrate is disposed between the elements and the substrate to reduce the longest wavelength at which resonance occurs. The region may comprise a plurality of ribs extending from the substrate and supporting the elements. The ribs may be formed by etching slots into the substrate using the elements as a mask. The region may also comprise at least one layer of dielectric film. In addition the region may be comprise ribs extending from the surface, each having at least one layer of dielectric film disposed thereon.
摘要翻译： 用于可见光谱的宽带线栅偏振器具有支撑在基板上的多个细长元件。 在元件和基板之间设置折射率低于基板的折射率的区域，以减少发生共振的最长波长。 该区域可以包括从基板延伸并支撑元件的多个肋。 肋可以通过使用元件作为掩模将狭槽蚀刻到衬底中而形成。 该区域还可以包括至少一层电介质膜。 此外，区域可以包括从表面延伸的肋，每个具有设置在其上的至少一层电介质膜。
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2.发明申请公开(公告)号：US20090168171A1
公开(公告)日：2009-07-02
申请号：US12400100
申请日：2009-03-09
IPC分类号： G02B5/30
CPC分类号： G02B5/3058
摘要： A multilayer wire-grid polarizer for polarizing light includes a stack of thin film layers disposed over a substrate, including a wire-grid array of elongated metal elements having lengths longer than a wavelength of the light and a period less than half the wavelength of the light. One of the layers can include a thin film layer with a refractive index greater than a refractive index of the substrate. One of the thin film layers can include a dielectric array of non-metal elements.
摘要翻译： 用于偏振光的多层线栅偏振器包括设置在衬底上的薄层层叠，包括具有比光的波长长的长度的细长金属元素的线栅阵列和小于所述光的波长的一半的周期 光。 层中的一个可以包括折射率大于衬底的折射率的薄膜层。 薄膜层之一可以包括非金属元素的电介质阵列。
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3.发明申请公开(公告)号：US20120008205A1
公开(公告)日：2012-01-12
申请号：US13234444
申请日：2011-09-16
IPC分类号： G02B5/30
CPC分类号： G02B5/3058
摘要： A wire-grid polarizer includes a stack of thin film layers disposed over a substrate including a wire grid layer and a plurality of thin film layers disposed between the wire grid layer and the substrate. The wire-grid layer includes an array of elongated metal elements, comprising lengths longer than a wavelength of visible light, a period less than 200 nanometers, a height less than 400 nanometers; and a material selected from the group consisting of aluminum, silver, gold, copper, or combinations thereof. The plurality of thin film layers disposed between the wire grid layer and the substrate include at least one dielectric grid layer and at least one thin film layer comprising silicon. The dielectric grid layer and the wire-grid are substantially parallel with one another, have substantially equal periods, and have substantially equal widths.
摘要翻译： 线栅偏振器包括设置在包括线栅层和设置在线栅层和衬底之间的多个薄膜层的衬底上的薄膜层堆叠。 线栅层包括细长金属元件的阵列，其包括长于可见光波长的长度，小于200纳米的周期，小于400纳米的高度; 和选自铝，银，金，铜或其组合的材料。 设置在线栅层和衬底之间的多个薄膜层包括至少一个电介质栅极层和至少一个包含硅的薄膜层。 介电栅格层和线栅基本上彼此平行，具有基本相同的周期，并且具有基本相等的宽度。
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4.发明申请公开(公告)号：US20100328770A1
公开(公告)日：2010-12-30
申请号：US12879315
申请日：2010-09-10
IPC分类号： G02B5/30
CPC分类号： G02B5/3058
摘要： A wire-grid polarizer includes a wire-grid layer disposed over a substrate. A plurality of contiguous dielectric-grid layers are contiguous with one another and disposed directly on top of the wire-grid layer. The plurality of contiguous dielectric-grid layers includes different materials with different indices of refraction. The array of dielectric material elements and the array of metal elements are oriented substantially parallel with one another, and the arrays having substantially equal periods.
摘要翻译： 线栅偏振器包括设置在基板上的线栅层。 多个连续的电介质栅格层彼此邻接并且直接设置在线栅层的顶部上。 多个连续的电介质栅格层包括具有不同折射率的不同材料。 电介质材料元件阵列和金属元件阵列彼此基本平行地定向，并且阵列具有基本相同的周期。
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公开(公告)号：US07306338B2
公开(公告)日：2007-12-11
申请号：US11075841
申请日：2005-03-08
IPC分类号： G03B21/14
CPC分类号： H04N9/315 , G03B21/2073
摘要： An image projection system has a wire grid polarizing beam splitter which functions as both the polarizer and the analyzer in the system. A light source produces a source light beam directed at the beam splitter which reflects one polarization and transmits the other. A liquid crystal array is disposed in either the reflected or transmitted beam. The array modulates the polarization of the beam, encoding image information thereon, and directs the modulated beam back to the beam splitter. The beam splitter again reflects one polarization and transmits the other so that the encoded image is either reflected or transmitted to a screen. The wire grid polarizing beam splitter is capable of being oriented at various incident angles with respect to the source light beam and modulated beam, and accepts relatively divergent light.
摘要翻译： 图像投影系统具有线偏振光束分离器，其作为系统中的偏振器和分析仪。 光源产生指向分束器的源光束，其反射一个偏振并透射另一个偏振光。 液晶阵列设置在反射或透射光束中。 阵列调制光束的极化，对其上的图像信息进行编码，并将调制的光束引导回分束器。 分束器再次反射一个偏振并且透射另一个偏振，使得编码图像被反射或传输到屏幕。 线栅偏振分束器能够相对于源光束和调制光束以各种入射角定向，并且接受相对发散的光。
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公开(公告)号：US07570424B2
公开(公告)日：2009-08-04
申请号：US11005927
申请日：2004-12-06
IPC分类号： G02B5/30
CPC分类号： G02B5/3058
摘要： A multilayer wire-grid polarizer for polarizing light includes a stack of thin film layers disposed over a substrate, including a wire-grid array of elongated metal elements having lengths longer than a wavelength of the light and a period less than half the wavelength of the light. One of the layers can include a thin film layer with a refractive index greater than a refractive index of the substrate. One of the thin film layers can include a dielectric array of non-metal elements.
摘要翻译： 用于偏振光的多层线栅偏振器包括设置在衬底上的薄层层叠，包括具有比光的波长长的长度的细长金属元素的线栅阵列和小于所述光的波长的一半的周期 光。 层中的一个可以包括折射率大于衬底的折射率的薄膜层。 薄膜层之一可以包括非金属元素的电介质阵列。
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7.发明授权公开(公告)号：US08027087B2
公开(公告)日：2011-09-27
申请号：US12879315
申请日：2010-09-10
IPC分类号： G02B5/30
CPC分类号： G02B5/3058
摘要： A wire-grid polarizer includes a wire-grid layer disposed over a substrate. A plurality of contiguous dielectric-grid layers are contiguous with one another and disposed directly on top of the wire-grid layer. The plurality of contiguous dielectric-grid layers includes different materials with different indices of refraction. The array of dielectric material elements and the array of metal elements are oriented substantially parallel with one another, and the arrays having substantially equal periods.
摘要翻译： 线栅偏振器包括设置在基板上的线栅层。 多个连续的电介质栅格层彼此邻接并且直接设置在线栅层的顶部上。 多个连续的电介质栅格层包括具有不同折射率的不同材料。 电介质材料元件阵列和金属元件阵列彼此基本平行地定向，并且阵列具有基本相同的周期。
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8.发明授权公开(公告)号：US07813039B2
公开(公告)日：2010-10-12
申请号：US12400100
申请日：2009-03-09
IPC分类号： G02B5/18
CPC分类号： G02B5/3058
摘要： A multilayer wire-grid polarizer for polarizing light includes a stack of thin film layers disposed over a substrate, including a wire-grid array of elongated metal elements having lengths longer than a wavelength of the light and a period less than half the wavelength of the light. One of the layers can include a thin film layer with a refractive index greater than a refractive index of the substrate. One of the thin film layers can include a dielectric array of non-metal elements.
摘要翻译： 用于偏振光的多层线栅偏振器包括设置在衬底上的薄层层叠，包括具有比光的波长长的长度的细长金属元素的线栅阵列和小于所述光的波长的一半的周期 光。 层中的一个可以包括折射率大于衬底的折射率的薄膜层。 薄膜层之一可以包括非金属元素的电介质阵列。
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公开(公告)号：US06288840B1
公开(公告)日：2001-09-11
申请号：US09480393
申请日：2000-01-11
IPC分类号： G02B530
CPC分类号： G02B5/3058 , G02B5/1809
摘要： An embedded wire grid polarizer for the visible spectrum includes an array of parallel, elongated, spaced-apart elements sandwiched between first and second layers. The elements form a plurality of gaps between the elements which provide a refractive index less than the refractive index of the first layer. Regions may be formed between the elements and the first and/or second layers which also provide a refractive index which is less than the refractive index of the layers. The regions may be formed by film layers or ribs/grooves formed in the layers.
摘要翻译： 用于可见光谱的嵌入式线栅偏振器包括夹在第一和第二层之间的平行的，细长的间隔开的元件阵列。 这些元件在元件之间形成多个间隙，其提供的折射率小于第一层的折射率。 区域可以形成在元件和第一和/或第二层之间，其还提供小于层的折射率的折射率。 这些区域可以由形成在层中的膜层或肋/沟槽形成。
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公开(公告)号：US5458084A
公开(公告)日：1995-10-17
申请号：US164362
申请日：1993-12-09
CPC分类号： B82Y10/00 , B82Y40/00 , G03F1/24 , G21K1/062 , G21K2201/061
摘要： X-ray wave diffraction devices are constructed using atomic layer epetaxy. A crystalline substrate is prepared with one or more surface areas on which multiple pairs of layers of material are to be deposited. These layers are then formed by atomic layer epetaxy on the surface areas of the substrate, one on top of another, with the material of each layer of each pair being selected to have a different index of refraction from that of the material of the other layer of each pair. The layers are formed so that the thickness of each layer of a pair is substantially the same as that of the corresponding layer of every other pair and so that x-ray waves impinging on the layers may be reflected therefrom. Layer pairs having a thickness of about 20 angstroms or less are formed on the substrate.
摘要翻译： 使用原子层epetaxy构造X射线波衍射装置。 制备具有一个或多个表面区域的晶体衬底，在多个表面区域上沉积多对材料层。 这些层然后通过原子层外延在衬底的表面区域上形成，一个在另一个的顶部上，每对的每个层的材料被选择为具有与另一层的材料的折射率不同的折射率 的每一对。 这些层被形成为使得每一层的每个层的厚度与每隔一对的相应层的厚度基本相同，并且使得撞击在层上的X射线波可能被反射。 在基板上形成具有约20埃或更小厚度的层对。
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