公开(公告)号：US20230392286A1

公开(公告)日：2023-12-07

申请号：US18115346

申请日：2023-02-28

申请人： Resonac Corporation

发明人： Masato ITO ,  Hiromasa SUO

IPC分类号： C30B29/36 ,  C01B32/956

CPC分类号： C30B29/36 ,  C01B32/956 ,  C01P2006/40

摘要： In the SiC substrate, when resistivities at a plurality of first measurement points that are in a region inside a boundary located 5 mm inward from an outer circumferential end thereof and that include a center and a plurality of measurement points separated by 10 mm from each other in the [11-20] direction or the [−1-120] direction from the center, and at two second measurement points that are located 1 mm inward from the outer circumferential end and located in each of the [11-20] direction from the center and the [−1-120] direction from the center are measured, a difference between the maximum resistivity and the minimum resistivity among the resistivities of each of the plurality of first measurement points and the two second measurement points is 2 mΩ·cm or less, and a region other than a high nitrogen concentration region called a facet is included.

公开(公告)号：US20230391626A1

公开(公告)日：2023-12-07

申请号：US18175134

申请日：2023-02-27

申请人： Resonac Corporation

发明人： Masato ITO ,  Hiromasa SUO

IPC分类号： C01B32/956

CPC分类号： C01B32/956 ,  C01P2006/80 ,  C01P2006/60

摘要： In a SiC substrate according to the present embodiment, a proportion of a first region in which a difference between a maximum value and a minimum value of absorption coefficient for light having a wavelength of 1064 nm is 0.25 cm−1 or less is 70% or more of the total area.

公开(公告)号：US20230391627A1

公开(公告)日：2023-12-07

申请号：US18175934

申请日：2023-02-28

申请人： Resonac Corporation

发明人： Masato ITO ,  Hiromasa SUO

IPC分类号： C01B32/956

CPC分类号： C01B32/956 ,  C01P2006/80 ,  C01P2006/60

摘要： In a SiC substrate according to the present embodiment, between any two adjacent measurement points among a plurality of first measurement points including a center and a plurality of measurement points separated from the center by 10 mm in an [11-20] direction or [−1-120] direction, a difference in absorption coefficient for light having a wavelength of 1064 nm is 0.25 cm−1 or less.