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7 条记录 (耗时 0.022 秒)

    Method and system of controlled movement of dynamic-route WIP
    1.
    发明申请
    Method and system of controlled movement of dynamic-route WIP 失效
    动态路由WIP的受控移动方法和系统

    公开(公告)号：US20070239303A1

    公开(公告)日：2007-10-11

    申请号：US11393030

    申请日：2006-03-30

    申请人： Richard Burda ,  Aseem Joshi ,  Sameer Shikalgar ,  Susan Kangas van Oss ,  Patrick Varekamp

    发明人： Richard Burda ,  Aseem Joshi ,  Sameer Shikalgar ,  Susan Kangas van Oss ,  Patrick Varekamp

    IPC分类号： G06F19/00

    CPC分类号： G06Q10/06

    摘要： A system and method for driving new technology WIP at a controlled speed side-by-side with production WIP using a common range management infrastructure. The system and method allow new technology WIP and production WIP to be driven together in the same fabricator with the same degree of speed and predictability. The system and method may include at least one device configured to create a target based on a sum of active WIP targets for at least one route, find all lots of active WIP on the at least one route, tag each of the lots until a first occurrence of a sum of WIP of the tagged lots exceeds or equals the target, and assign a priority to each of the tagged lots based on a predetermined criteria.

    摘要翻译： 使用共同的范围管理基础设施，通过生产WIP并行地以受控的速度驱动新技术WIP的系统和方法。 系统和方法允许新技术WIP和生产WIP以相同的速度和可预测性在相同的制造商中一起驱动。 所述系统和方法可以包括至少一个设备，其被配置为基于至少一个路由的活动WIP目标的总和来创建目标，在所述至少一个路由上找到所有大量的活动WIP，将每个批次标记，直到第一个 标签批次的WIP总和的发生超过或等于目标，并且基于预定标准为每个标记批次分配优先级。

    METHOD AND SYSTEM FOR INTELLIGENT AUTOMATED RETICLE MANAGMENT
    6.
    发明申请
    METHOD AND SYSTEM FOR INTELLIGENT AUTOMATED RETICLE MANAGMENT 有权
    智能自动化管理的方法与系统

    公开(公告)号：US20070168318A1

    公开(公告)日：2007-07-19

    申请号：US11669179

    申请日：2007-01-31

    申请人： Richard Burda ,  Alfred Degbotse ,  Brian Denton ,  Kenneth Fordyce ,  Sanjay Hegde ,  Robert Milne ,  Sameer Shikalgar ,  Guogang Zuo

    发明人： Richard Burda ,  Alfred Degbotse ,  Brian Denton ,  Kenneth Fordyce ,  Sanjay Hegde ,  Robert Milne ,  Sameer Shikalgar ,  Guogang Zuo

    IPC分类号： G06F17/30

    CPC分类号： G03F7/70741

    摘要： A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing stations prior to the processing tool, determining auxiliary equipment allocation needs for the processing tool based on characteristics associated with the plurality of workpieces prior to the workpieces arriving at the processing tool, and sending auxiliary equipment to the processing tool based on the allocation needs prior to the workpieces arriving at the processing tool. According to an embodiment of the invention, the processing tool comprises a photolithographic system, the auxiliary equipment comprises a reticle, and the plurality of workpieces comprise semiconductor substrates.

    摘要翻译： 一种用于实现控制制造系统的方法的方法，系统和程序存储装置，其中所述方法包括在处理工具上提供待加工的多个工件，所述多个工件位于处理工具之前的处理站， 在工件到达处理工具之前，基于与多个工件相关联的特性来确定处理工具的辅助设备分配需求，以及基于在工件到达处理工具之前的分配需求将辅助设备发送到处理工具 。 根据本发明的实施例，处理工具包括光刻系统，辅助设备包括掩模版，并且多个工件包括半导体衬底。

    Method and system for intelligent automated reticle management
    7.
    发明申请
    Method and system for intelligent automated reticle management 有权
    智能自动标线管理方法与系统

    公开(公告)号：US20060052889A1

    公开(公告)日：2006-03-09

    申请号：US10711079

    申请日：2004-08-20

    申请人： Richard Burda ,  Alfred Degbotse ,  Brian Denton ,  Kenneth Fordyce ,  Sanjay Hegde ,  Robert Milne ,  Sameer Shikalgar ,  Guogang Zuo

    发明人： Richard Burda ,  Alfred Degbotse ,  Brian Denton ,  Kenneth Fordyce ,  Sanjay Hegde ,  Robert Milne ,  Sameer Shikalgar ,  Guogang Zuo

    IPC分类号： G06F19/00

    CPC分类号： G03F7/70741

    摘要： A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing stations prior to the processing tool, determining auxiliary equipment allocation needs for the processing tool based on characteristics associated with the plurality of workpieces prior to the workpieces arriving at the processing tool, and sending auxiliary equipment to the processing tool based on the allocation needs prior to the workpieces arriving at the processing tool. According to an embodiment of the invention, the processing tool comprises a photolithographic system, the auxiliary equipment comprises a reticle, and the plurality of workpieces comprise semiconductor substrates.

    摘要翻译： 一种用于实现控制制造系统的方法的方法，系统和程序存储装置，其中所述方法包括在处理工具上提供待加工的多个工件，所述多个工件位于处理工具之前的处理站， 在工件到达处理工具之前，基于与多个工件相关联的特性来确定处理工具的辅助设备分配需求，以及基于在工件到达处理工具之前的分配需求将辅助设备发送到处理工具 。 根据本发明的实施例，处理工具包括光刻系统，辅助设备包括掩模版，并且多个工件包括半导体衬底。