Method and system of controlled movement of dynamic-route WIP
    4.
    发明申请
    Method and system of controlled movement of dynamic-route WIP 失效
    动态路由WIP的受控移动方法和系统

    公开(公告)号:US20070239303A1

    公开(公告)日:2007-10-11

    申请号:US11393030

    申请日:2006-03-30

    IPC分类号: G06F19/00

    CPC分类号: G06Q10/06

    摘要: A system and method for driving new technology WIP at a controlled speed side-by-side with production WIP using a common range management infrastructure. The system and method allow new technology WIP and production WIP to be driven together in the same fabricator with the same degree of speed and predictability. The system and method may include at least one device configured to create a target based on a sum of active WIP targets for at least one route, find all lots of active WIP on the at least one route, tag each of the lots until a first occurrence of a sum of WIP of the tagged lots exceeds or equals the target, and assign a priority to each of the tagged lots based on a predetermined criteria.

    摘要翻译: 使用共同的范围管理基础设施,通过生产WIP并行地以受控的速度驱动新技术WIP的系统和方法。 系统和方法允许新技术WIP和生产WIP以相同的速度和可预测性在相同的制造商中一起驱动。 所述系统和方法可以包括至少一个设备,其被配置为基于至少一个路由的活动WIP目标的总和来创建目标,在所述至少一个路由上找到所有大量的活动WIP,将每个批次标记,直到第一个 标签批次的WIP总和的发生超过或等于目标,并且基于预定标准为每个标记批次分配优先级。

    METHOD AND SYSTEM FOR INTELLIGENT AUTOMATED RETICLE MANAGMENT
    6.
    发明申请
    METHOD AND SYSTEM FOR INTELLIGENT AUTOMATED RETICLE MANAGMENT 有权
    智能自动化管理的方法与系统

    公开(公告)号:US20070168318A1

    公开(公告)日:2007-07-19

    申请号:US11669179

    申请日:2007-01-31

    IPC分类号: G06F17/30

    CPC分类号: G03F7/70741

    摘要: A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing stations prior to the processing tool, determining auxiliary equipment allocation needs for the processing tool based on characteristics associated with the plurality of workpieces prior to the workpieces arriving at the processing tool, and sending auxiliary equipment to the processing tool based on the allocation needs prior to the workpieces arriving at the processing tool. According to an embodiment of the invention, the processing tool comprises a photolithographic system, the auxiliary equipment comprises a reticle, and the plurality of workpieces comprise semiconductor substrates.

    摘要翻译: 一种用于实现控制制造系统的方法的方法,系统和程序存储装置,其中所述方法包括在处理工具上提供待加工的多个工件,所述多个工件位于处理工具之前的处理站, 在工件到达处理工具之前,基于与多个工件相关联的特性来确定处理工具的辅助设备分配需求,以及基于在工件到达处理工具之前的分配需求将辅助设备发送到处理工具 。 根据本发明的实施例,处理工具包括光刻系统,辅助设备包括掩模版,并且多个工件包括半导体衬底。

    Method and system for intelligent automated reticle management
    7.
    发明申请
    Method and system for intelligent automated reticle management 有权
    智能自动标线管理方法与系统

    公开(公告)号:US20060052889A1

    公开(公告)日:2006-03-09

    申请号:US10711079

    申请日:2004-08-20

    IPC分类号: G06F19/00

    CPC分类号: G03F7/70741

    摘要: A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing stations prior to the processing tool, determining auxiliary equipment allocation needs for the processing tool based on characteristics associated with the plurality of workpieces prior to the workpieces arriving at the processing tool, and sending auxiliary equipment to the processing tool based on the allocation needs prior to the workpieces arriving at the processing tool. According to an embodiment of the invention, the processing tool comprises a photolithographic system, the auxiliary equipment comprises a reticle, and the plurality of workpieces comprise semiconductor substrates.

    摘要翻译: 一种用于实现控制制造系统的方法的方法,系统和程序存储装置,其中所述方法包括在处理工具上提供待加工的多个工件,所述多个工件位于处理工具之前的处理站, 在工件到达处理工具之前,基于与多个工件相关联的特性来确定处理工具的辅助设备分配需求,以及基于在工件到达处理工具之前的分配需求将辅助设备发送到处理工具 。 根据本发明的实施例,处理工具包括光刻系统,辅助设备包括掩模版,并且多个工件包括半导体衬底。

    METHOD, SYSTEM, AND COMPUTER PROGRAM PRODUCT FOR CONTROLLING THE FLOW OF MATERIAL IN A MANUFACTURING FACILITY USING AN EXTENDED ZONE OF CONTROL
    8.
    发明申请
    METHOD, SYSTEM, AND COMPUTER PROGRAM PRODUCT FOR CONTROLLING THE FLOW OF MATERIAL IN A MANUFACTURING FACILITY USING AN EXTENDED ZONE OF CONTROL 失效
    方法,系统和计算机程序产品,用于使用扩展的控制区控制制造设备中材料的流动

    公开(公告)号:US20070100486A1

    公开(公告)日:2007-05-03

    申请号:US11163793

    申请日:2005-10-31

    IPC分类号: G06F19/00

    CPC分类号: G06Q10/06

    摘要: The present invention provides a method, system, and computer program product for controlling the flow of material in a manufacturing facility using an extended zone of control. A method in accordance to an embodiment of the present invention comprises establishing an extended zone of control including a high impact tool set and at least one other tool set, analyzing projected job arrivals at the high impact tool set, and adjusting a flow of material between the high impact tool set and the at least one other tool set based on the analysis of projected job arrivals at the high impact tool set.

    摘要翻译: 本发明提供一种方法,系统和计算机程序产品,用于使用扩展控制区域来控制制造设备中的材料的流动。 根据本发明的实施例的方法包括建立包括高冲击工具组和至少一个其他工具组的扩展控制区域,分析在高冲击工具组上的投影作业到达,以及调整在高冲击工具组之间的材料流动 高冲击工具组和至少一个其他工具组,其基于对高冲击工具组的预期工作到达的分析。

    SYSTEM FOR DISPATCHING SEMICONDUCTORS LOTS
    9.
    发明申请
    SYSTEM FOR DISPATCHING SEMICONDUCTORS LOTS 有权
    分配半导体器件的系统

    公开(公告)号:US20060282187A1

    公开(公告)日:2006-12-14

    申请号:US11307288

    申请日:2006-01-31

    IPC分类号: G06F19/00

    摘要: A system for dispatching a plurality of semiconductor lots among a plurality of tools is provided. The system includes a dispatch server manager and a dispatch integrator and display device. The dispatch integrator and display device conveys a dispatch request to the manager and receives a dispatch list from the manager. The manager queries for a processing status of the plurality of semiconductor lots and displays a dispatch list in response to the processing status. The dispatch list includes an associated reason and/or code related to the processing status.

    摘要翻译: 提供了一种用于在多个工具中调度多个半导体块的系统。 该系统包括调度服务器管理器和调度集成器和显示设备。 调度积分器和显示设备向管理者传送调度请求,并从管理器接收调度列表。 管理者查询多个半导体块的处理状态,并响应处理状态显示调度列表。 调度列表包括与处理状态相关的相关原因和/或代码。

    METHOD OF RELEASE AND PRODUCT FLOW MANAGEMENT FOR A MANUFACTURING FACILITY
    10.
    发明申请
    METHOD OF RELEASE AND PRODUCT FLOW MANAGEMENT FOR A MANUFACTURING FACILITY 失效
    制造设备的泄漏和产品流程管理方法

    公开(公告)号:US20060259175A1

    公开(公告)日:2006-11-16

    申请号:US10908420

    申请日:2005-05-11

    IPC分类号: G06F19/00

    摘要: A method and computer program product for scheduling product lots through operations of a manufacturing line. The method including: selecting a sequential subset of a set of sequential operations required to manufacture the lots; partitioning the product lots into designated lots and non-designated lots; and generating a release schedule for each of the non-designated lots into one or more operations of the sequential subset of the set of sequential operations; generating a release schedule for each of the designated lots into each operation of the sequential subset of the set of sequential operations such that for each designated lot a total amount of time measured from completion of a first operation of the sequential subset of the set of sequential operations through start of a last operation of the sequential subset of the set of sequential operations does not exceed a target amount of time for the designated lots.

    摘要翻译: 一种用于通过生产线的操作调度产品批次的方法和计算机程序产品。 该方法包括:选择制造批次所需的一组顺序操作的顺序子集; 将产品划分为指定地段和非指定地段; 以及将所述非指定批次中的每一个生成到所述一组顺序操作的顺序子集的一个或多个操作中的释放时间表; 为每个指定批次的每个操作生成顺序操作的顺序子集的每个操作的发布时间表,使得对于每个指定批次,从完成该顺序集合的顺序子集的第一操作所测量的总时间量 通过开始该顺序操作的顺序子集的最后操作的操作不超过指定批次的目标时间量。