公开(公告)号：US07953507B2

公开(公告)日：2011-05-31

申请号：US11669179

申请日：2007-01-31

申请人： Richard G. Burda ,  Alfred Degbotse ,  Brian T. Denton ,  Kenneth J. Fordyce ,  Sanjay Hegde ,  Robert J. Milne ,  Sameer T. Shikalgar ,  Guogang Zuo

发明人： Richard G. Burda ,  Alfred Degbotse ,  Brian T. Denton ,  Kenneth J. Fordyce ,  Sanjay Hegde ,  Robert J. Milne ,  Sameer T. Shikalgar ,  Guogang Zuo

IPC分类号： G06F19/00

CPC分类号： G03F7/70741

摘要： A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing stations prior to the processing tool, determining auxiliary equipment allocation needs for the processing tool based on characteristics associated with the plurality of workpieces prior to the workpieces arriving at the processing tool, and sending auxiliary equipment to the processing tool based on the allocation needs prior to the workpieces arriving at the processing tool. According to an embodiment of the invention, the processing tool comprises a photolithographic system, the auxiliary equipment comprises a reticle, and the plurality of workpieces comprise semiconductor substrates.

摘要翻译： 一种用于实现控制制造系统的方法的方法，系统和程序存储装置，其中所述方法包括在处理工具上提供待加工的多个工件，所述多个工件位于处理工具之前的处理站， 在工件到达处理工具之前，基于与多个工件相关联的特性来确定处理工具的辅助设备分配需求，以及基于在工件到达处理工具之前的分配需求将辅助设备发送到处理工具 。 根据本发明的实施例，处理工具包括光刻系统，辅助设备包括掩模版，并且多个工件包括半导体衬底。

公开(公告)号：US20070168318A1

公开(公告)日：2007-07-19

申请号：US11669179

申请日：2007-01-31

申请人： Richard Burda ,  Alfred Degbotse ,  Brian Denton ,  Kenneth Fordyce ,  Sanjay Hegde ,  Robert Milne ,  Sameer Shikalgar ,  Guogang Zuo

发明人： Richard Burda ,  Alfred Degbotse ,  Brian Denton ,  Kenneth Fordyce ,  Sanjay Hegde ,  Robert Milne ,  Sameer Shikalgar ,  Guogang Zuo

IPC分类号： G06F17/30

CPC分类号： G03F7/70741

摘要： A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing stations prior to the processing tool, determining auxiliary equipment allocation needs for the processing tool based on characteristics associated with the plurality of workpieces prior to the workpieces arriving at the processing tool, and sending auxiliary equipment to the processing tool based on the allocation needs prior to the workpieces arriving at the processing tool. According to an embodiment of the invention, the processing tool comprises a photolithographic system, the auxiliary equipment comprises a reticle, and the plurality of workpieces comprise semiconductor substrates.

摘要翻译： 一种用于实现控制制造系统的方法的方法，系统和程序存储装置，其中所述方法包括在处理工具上提供待加工的多个工件，所述多个工件位于处理工具之前的处理站， 在工件到达处理工具之前，基于与多个工件相关联的特性来确定处理工具的辅助设备分配需求，以及基于在工件到达处理工具之前的分配需求将辅助设备发送到处理工具 。 根据本发明的实施例，处理工具包括光刻系统，辅助设备包括掩模版，并且多个工件包括半导体衬底。

公开(公告)号：US20060052889A1

公开(公告)日：2006-03-09

申请号：US10711079

申请日：2004-08-20

申请人： Richard Burda ,  Alfred Degbotse ,  Brian Denton ,  Kenneth Fordyce ,  Sanjay Hegde ,  Robert Milne ,  Sameer Shikalgar ,  Guogang Zuo

发明人： Richard Burda ,  Alfred Degbotse ,  Brian Denton ,  Kenneth Fordyce ,  Sanjay Hegde ,  Robert Milne ,  Sameer Shikalgar ,  Guogang Zuo

IPC分类号： G06F19/00

CPC分类号： G03F7/70741

摘要： A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing stations prior to the processing tool, determining auxiliary equipment allocation needs for the processing tool based on characteristics associated with the plurality of workpieces prior to the workpieces arriving at the processing tool, and sending auxiliary equipment to the processing tool based on the allocation needs prior to the workpieces arriving at the processing tool. According to an embodiment of the invention, the processing tool comprises a photolithographic system, the auxiliary equipment comprises a reticle, and the plurality of workpieces comprise semiconductor substrates.

摘要翻译： 一种用于实现控制制造系统的方法的方法，系统和程序存储装置，其中所述方法包括在处理工具上提供待加工的多个工件，所述多个工件位于处理工具之前的处理站， 在工件到达处理工具之前，基于与多个工件相关联的特性来确定处理工具的辅助设备分配需求，以及基于在工件到达处理工具之前的分配需求将辅助设备发送到处理工具 。 根据本发明的实施例，处理工具包括光刻系统，辅助设备包括掩模版，并且多个工件包括半导体衬底。

公开(公告)号：US20070121506A1

公开(公告)日：2007-05-31

申请号：US11382213

申请日：2006-05-08

申请人： Bartek Wydrowski ,  Sanjay Hegde ,  Cheng Jin ,  Steven Low

发明人： Bartek Wydrowski ,  Sanjay Hegde ,  Cheng Jin ,  Steven Low

IPC分类号： H04L12/26

CPC分类号： H04L1/1874 ,  H04L1/1887 ,  H04L47/10 ,  H04L47/12 ,  H04L47/27 ,  H04L47/283 ,  H04L47/30 ,  H04L47/50 ,  H04L47/624 ,  H04L47/626 ,  H04L69/16 ,  H04L69/163

摘要： The invention provides a method and apparatus for decoupling loss recovery from congestion and window control. The system provides improved performance in high loss environments such as wireless links. The system avoids unnecessary window adjustment in response to packet losses. Transmission rates can be maintained with out compromising loss recovery. The invention uses just-in-time Packet Expiration, Transmission Order Queue, a Forward Retransmission Algorithm and Window Control to provide improved performance. The invention maintains a queue of packets in flight called the Transmission Order Queue (TOQ). When an acknowledgement is received for a packet in the in-flight queue, that packet is removed from the queue. If a packet is still in the queue for a certain threshold time, the invention assumes that it is lost. At that point, the packet is removed from the in-flight queue and the packet is retransmitted.

摘要翻译： 本发明提供一种用于将丢失恢复与拥塞和窗口控制分离的方法和装置。 该系统在诸如无线链路的高损耗环境中提供改进的性能。 系统避免了响应分组丢失的不必要的窗口调整。 传输速率可以通过损失恢复来维持。 本发明使用即时分组过期，传输顺序队列，前向重传算法和窗口控制来提供改进的性能。 本发明保持了在航班中称为传输顺序队列（TOQ）的分组队列。 当在飞行队列中收到一个数据包的确认信息时，该数据包将从队列中删除。 如果分组仍然在队列中达到某个阈值时间，则本发明假设它丢失。 此时，数据包将从飞行中队列中删除，并重新发送数据包。