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    Method and system for intelligent automated reticle managment
    1.
    发明授权
    Method and system for intelligent automated reticle managment 有权
    智能自动光罩管理方法与系统

    公开(公告)号：US07953507B2

    公开(公告)日：2011-05-31

    申请号：US11669179

    申请日：2007-01-31

    申请人： Richard G. Burda ,  Alfred Degbotse ,  Brian T. Denton ,  Kenneth J. Fordyce ,  Sanjay Hegde ,  Robert J. Milne ,  Sameer T. Shikalgar ,  Guogang Zuo

    发明人： Richard G. Burda ,  Alfred Degbotse ,  Brian T. Denton ,  Kenneth J. Fordyce ,  Sanjay Hegde ,  Robert J. Milne ,  Sameer T. Shikalgar ,  Guogang Zuo

    IPC分类号： G06F19/00

    CPC分类号： G03F7/70741

    摘要： A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing stations prior to the processing tool, determining auxiliary equipment allocation needs for the processing tool based on characteristics associated with the plurality of workpieces prior to the workpieces arriving at the processing tool, and sending auxiliary equipment to the processing tool based on the allocation needs prior to the workpieces arriving at the processing tool. According to an embodiment of the invention, the processing tool comprises a photolithographic system, the auxiliary equipment comprises a reticle, and the plurality of workpieces comprise semiconductor substrates.

    摘要翻译： 一种用于实现控制制造系统的方法的方法，系统和程序存储装置，其中所述方法包括在处理工具上提供待加工的多个工件，所述多个工件位于处理工具之前的处理站， 在工件到达处理工具之前，基于与多个工件相关联的特性来确定处理工具的辅助设备分配需求，以及基于在工件到达处理工具之前的分配需求将辅助设备发送到处理工具 。 根据本发明的实施例，处理工具包括光刻系统，辅助设备包括掩模版，并且多个工件包括半导体衬底。

    Method and system for intelligent automated reticle management
    2.
    发明授权
    Method and system for intelligent automated reticle management 有权
    智能自动标线管理方法与系统

    公开(公告)号：US07206652B2

    公开(公告)日：2007-04-17

    申请号：US10711079

    申请日：2004-08-20

    申请人： Richard G. Burda ,  Alfred Degbotse ,  Brian T Denton ,  Kenneth J. Fordyce ,  Robert J. Milne ,  Sameer T. Shikalgar ,  Guogang Zuo

    发明人： Richard G. Burda ,  Alfred Degbotse ,  Brian T Denton ,  Kenneth J. Fordyce ,  Robert J. Milne ,  Sameer T. Shikalgar ,  Guogang Zuo

    IPC分类号： G06F19/00

    CPC分类号： G03F7/70741

    摘要： A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing stations prior to the processing tool, determining auxiliary equipment allocation needs for the processing tool based on characteristics associated with the plurality of workpieces prior to the workpieces arriving at the processing tool, and sending auxiliary equipment to the processing tool based on the allocation needs prior to the workpieces arriving at the processing tool. According to an embodiment of the invention, the processing tool comprises a photolithographic system, the auxiliary equipment comprises a reticle, and the plurality of workpieces comprise semiconductor substrates.

    摘要翻译： 一种用于实现控制制造系统的方法的方法，系统和程序存储装置，其中所述方法包括在处理工具上提供待加工的多个工件，所述多个工件位于处理工具之前的处理站， 在工件到达处理工具之前，基于与多个工件相关联的特性来确定处理工具的辅助设备分配需求，以及基于在工件到达处理工具之前的分配需求将辅助设备发送到处理工具 。 根据本发明的实施例，处理工具包括光刻系统，辅助设备包括掩模版，并且多个工件包括半导体衬底。

    Method, system, and computer program product for improved flow of development lots in a manufacturing facility
    3.
    发明授权
    Method, system, and computer program product for improved flow of development lots in a manufacturing facility 失效
    方法，系统和计算机程序产品，用于改进制造设施中开发批次的流动

    公开(公告)号：US07239930B2

    公开(公告)日：2007-07-03

    申请号：US10908714

    申请日：2005-05-24

    申请人： Richard G. Burda ,  Alfred Degbotse ,  Brian T. Denton ,  Kenneth J. Fordyce ,  Robert J. Milne ,  Elizabeth L. Williamson

    发明人： Richard G. Burda ,  Alfred Degbotse ,  Brian T. Denton ,  Kenneth J. Fordyce ,  Robert J. Milne ,  Elizabeth L. Williamson

    IPC分类号： G06F19/00

    CPC分类号： G06Q10/06 ,  Y02P90/86

    摘要： The present invention provides a method, system, and computer program product for improved flow of development lots in a manufacturing facility. A method in accordance to one embodiment of the present invention comprises: establishing at least one target for processing of a set of development lots in the manufacturing facility; monitoring a progress of the set of development lots in the manufacturing facility; comparing the progress of the set of development lots against the at least one target; establishing at least one suggested action for the set of development lots if the progress of the set of development lots deviates from the at least one target; and deciding which development lots in the set of development lots to assign to at least one tool in the manufacturing facility, wherein the at least one suggested action is incorporated into the assignment decision.

    摘要翻译： 本发明提供了一种用于改进制造设备中的开发批次的流程的方法，系统和计算机程序产品。 根据本发明的一个实施例的方法包括：建立至少一个目标，用于处理制造设施中的一组开发批次; 监测制造设施中的一批开发项目的进度; 将发展项目集合的进度与至少一个目标进行比较; 如果一组开发项目的进度偏离至少一个目标，则为该组开发项目建立至少一个建议行动; 以及将所述开发批次中的哪些开发批次分配给所述制造设施中的至少一个工具，其中所述至少一个建议的动作被并入到所述分配决定中。

    Method, system, and computer program product for controlling the flow of material in a manufacturing facility using an extended zone of control
    4.
    发明授权
    Method, system, and computer program product for controlling the flow of material in a manufacturing facility using an extended zone of control 失效
    方法，系统和计算机程序产品，用于使用扩展控制区域来控制制造设备中材料的流动

    公开(公告)号：US07305276B2

    公开(公告)日：2007-12-04

    申请号：US11163793

    申请日：2005-10-31

    申请人： Richard G. Burda ,  Alfred T. Degbotse ,  Brian T. Denton ,  Kenneth J. Fordyce ,  Robert J. Milne

    发明人： Richard G. Burda ,  Alfred T. Degbotse ,  Brian T. Denton ,  Kenneth J. Fordyce ,  Robert J. Milne

    IPC分类号： G06F19/00

    CPC分类号： G06Q10/06

    摘要： The present invention provides a method, system, and computer program product for controlling the flow of material in a manufacturing facility using an extended zone of control. A method in accordance to an embodiment of the present invention comprises establishing an extended zone of control including a high impact tool set and at least one other tool set, analyzing projected job arrivals at the high impact tool set, and adjusting a flow of material between the high impact tool set and the at least one other tool set based on the analysis of projected job arrivals at the high impact tool set.

    摘要翻译： 本发明提供一种方法，系统和计算机程序产品，用于使用扩展控制区域来控制制造设备中的材料的流动。 根据本发明的实施例的方法包括建立包括高冲击工具组和至少一个其他工具组的扩展控制区域，分析在高冲击工具组上的投影作业到达，以及调整在高冲击工具组之间的材料流动 高冲击工具组和至少一个其他工具组，其基于对高冲击工具组的预期工作到达的分析。

    Method and system of controlled movement of dynamic-route WIP
    7.
    发明授权
    Method and system of controlled movement of dynamic-route WIP 失效
    动态路由WIP的受控移动方法和系统

    公开(公告)号：US07477957B2

    公开(公告)日：2009-01-13

    申请号：US11393030

    申请日：2006-03-30

    申请人： Richard G. Burda ,  Aseem K. Joshi ,  Sameer T. Shikalgar ,  Susan Kangas van Oss ,  Patrick R. Varekamp

    发明人： Richard G. Burda ,  Aseem K. Joshi ,  Sameer T. Shikalgar ,  Susan Kangas van Oss ,  Patrick R. Varekamp

    IPC分类号： G06F19/00

    CPC分类号： G06Q10/06

    摘要： A system and method for driving new technology WIP at a controlled speed side-by-side with production WIP using a common range management infrastructure. The system and method allow new technology WIP and production WIP to be driven together in the same fabricator with the same degree of speed and predictability. The system and method may include at least one device configured to create a target based on a sum of active WIP targets for at least one route, find all lots of active WIP on the at least one route, tag each of the lots until a first occurrence of a sum of WIP of the tagged lots exceeds or equals the target, and assign a priority to each of the tagged lots based on a predetermined criteria.

    摘要翻译： 使用共同的范围管理基础设施，通过生产WIP并行地以受控的速度驱动新技术WIP的系统和方法。 系统和方法允许新技术WIP和生产WIP以相同的速度和可预测性在相同的制造商中一起驱动。 所述系统和方法可以包括至少一个设备，其被配置为基于至少一个路由的活动WIP目标的总和来创建目标，在所述至少一个路由上找到所有大量的活动WIP，将每个批次标记，直到第一个 标签批次的WIP总和的发生超过或等于目标，并且基于预定标准为每个标记批次分配优先级。