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公开(公告)号：US07953507B2
公开(公告)日：2011-05-31
申请号：US11669179
申请日：2007-01-31
申请人： Richard G. Burda , Alfred Degbotse , Brian T. Denton , Kenneth J. Fordyce , Sanjay Hegde , Robert J. Milne , Sameer T. Shikalgar , Guogang Zuo
发明人： Richard G. Burda , Alfred Degbotse , Brian T. Denton , Kenneth J. Fordyce , Sanjay Hegde , Robert J. Milne , Sameer T. Shikalgar , Guogang Zuo
IPC分类号： G06F19/00
CPC分类号： G03F7/70741
摘要： A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing stations prior to the processing tool, determining auxiliary equipment allocation needs for the processing tool based on characteristics associated with the plurality of workpieces prior to the workpieces arriving at the processing tool, and sending auxiliary equipment to the processing tool based on the allocation needs prior to the workpieces arriving at the processing tool. According to an embodiment of the invention, the processing tool comprises a photolithographic system, the auxiliary equipment comprises a reticle, and the plurality of workpieces comprise semiconductor substrates.
摘要翻译： 一种用于实现控制制造系统的方法的方法，系统和程序存储装置，其中所述方法包括在处理工具上提供待加工的多个工件，所述多个工件位于处理工具之前的处理站， 在工件到达处理工具之前，基于与多个工件相关联的特性来确定处理工具的辅助设备分配需求，以及基于在工件到达处理工具之前的分配需求将辅助设备发送到处理工具 。 根据本发明的实施例，处理工具包括光刻系统，辅助设备包括掩模版，并且多个工件包括半导体衬底。
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公开(公告)号：US07206652B2
公开(公告)日：2007-04-17
申请号：US10711079
申请日：2004-08-20
申请人： Richard G. Burda , Alfred Degbotse , Brian T Denton , Kenneth J. Fordyce , Robert J. Milne , Sameer T. Shikalgar , Guogang Zuo
发明人： Richard G. Burda , Alfred Degbotse , Brian T Denton , Kenneth J. Fordyce , Robert J. Milne , Sameer T. Shikalgar , Guogang Zuo
IPC分类号： G06F19/00
CPC分类号： G03F7/70741
摘要： A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing stations prior to the processing tool, determining auxiliary equipment allocation needs for the processing tool based on characteristics associated with the plurality of workpieces prior to the workpieces arriving at the processing tool, and sending auxiliary equipment to the processing tool based on the allocation needs prior to the workpieces arriving at the processing tool. According to an embodiment of the invention, the processing tool comprises a photolithographic system, the auxiliary equipment comprises a reticle, and the plurality of workpieces comprise semiconductor substrates.
摘要翻译： 一种用于实现控制制造系统的方法的方法，系统和程序存储装置，其中所述方法包括在处理工具上提供待加工的多个工件，所述多个工件位于处理工具之前的处理站， 在工件到达处理工具之前，基于与多个工件相关联的特性来确定处理工具的辅助设备分配需求，以及基于在工件到达处理工具之前的分配需求将辅助设备发送到处理工具 。 根据本发明的实施例，处理工具包括光刻系统，辅助设备包括掩模版，并且多个工件包括半导体衬底。
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3.发明授权Method, system, and computer program product for improved flow of development lots in a manufacturing facility 失效方法，系统和计算机程序产品，用于改进制造设施中开发批次的流动公开(公告)号：US07239930B2
公开(公告)日：2007-07-03
申请号：US10908714
申请日：2005-05-24
申请人： Richard G. Burda , Alfred Degbotse , Brian T. Denton , Kenneth J. Fordyce , Robert J. Milne , Elizabeth L. Williamson
发明人： Richard G. Burda , Alfred Degbotse , Brian T. Denton , Kenneth J. Fordyce , Robert J. Milne , Elizabeth L. Williamson
IPC分类号： G06F19/00
摘要： The present invention provides a method, system, and computer program product for improved flow of development lots in a manufacturing facility. A method in accordance to one embodiment of the present invention comprises: establishing at least one target for processing of a set of development lots in the manufacturing facility; monitoring a progress of the set of development lots in the manufacturing facility; comparing the progress of the set of development lots against the at least one target; establishing at least one suggested action for the set of development lots if the progress of the set of development lots deviates from the at least one target; and deciding which development lots in the set of development lots to assign to at least one tool in the manufacturing facility, wherein the at least one suggested action is incorporated into the assignment decision.
摘要翻译： 本发明提供了一种用于改进制造设备中的开发批次的流程的方法，系统和计算机程序产品。 根据本发明的一个实施例的方法包括：建立至少一个目标，用于处理制造设施中的一组开发批次; 监测制造设施中的一批开发项目的进度; 将发展项目集合的进度与至少一个目标进行比较; 如果一组开发项目的进度偏离至少一个目标，则为该组开发项目建立至少一个建议行动; 以及将所述开发批次中的哪些开发批次分配给所述制造设施中的至少一个工具，其中所述至少一个建议的动作被并入到所述分配决定中。
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4.发明授权Method, system, and computer program product for controlling the flow of material in a manufacturing facility using an extended zone of control 失效方法，系统和计算机程序产品，用于使用扩展控制区域来控制制造设备中材料的流动公开(公告)号：US07305276B2
公开(公告)日：2007-12-04
申请号：US11163793
申请日：2005-10-31
IPC分类号： G06F19/00
CPC分类号： G06Q10/06
摘要： The present invention provides a method, system, and computer program product for controlling the flow of material in a manufacturing facility using an extended zone of control. A method in accordance to an embodiment of the present invention comprises establishing an extended zone of control including a high impact tool set and at least one other tool set, analyzing projected job arrivals at the high impact tool set, and adjusting a flow of material between the high impact tool set and the at least one other tool set based on the analysis of projected job arrivals at the high impact tool set.
摘要翻译： 本发明提供一种方法，系统和计算机程序产品，用于使用扩展控制区域来控制制造设备中的材料的流动。 根据本发明的实施例的方法包括建立包括高冲击工具组和至少一个其他工具组的扩展控制区域，分析在高冲击工具组上的投影作业到达，以及调整在高冲击工具组之间的材料流动 高冲击工具组和至少一个其他工具组，其基于对高冲击工具组的预期工作到达的分析。
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5.发明授权System and method for batch scheduling of lots based on flow time and number of batches 失效基于流时间和批次数的批次批量调度系统和方法公开(公告)号：US07043322B1
公开(公告)日：2006-05-09
申请号：US10906825
申请日：2005-03-08
IPC分类号： G06F19/00
摘要： A system and method for utilizing computer-implementable decision support systems to determine factory schedules. Methodologies associated with the invention include advanced planning systems, optimization and heuristic based algorithms, constraint-based programming, and simulation. The method may iteratively assign lots to non-full batches based on comparison of the resulting impact to mean flow time with the continuously approximated cost per batch. Once lots have been assigned to batches, potential interchanges of lots among batches are explored. If the variable cost per batch changes from one interchange to the next, the method may backtrack and attempt to re-allocate lots to batches based on the increased cost per batch.
摘要翻译： 一种利用计算机可执行的决策支持系统来确定工厂时间表的系统和方法。 与本发明相关的方法包括高级规划系统，优化和基于启发式的算法，基于约束的编程和仿真。 基于所产生的影响与平均流动时间的比较，每个批次的连续近似成本，该方法可以迭代地将批次分配给非完整批次。 一批批次被分配到批次后，可以开展批次之间的潜在交易。 如果每个批量的可变成本从一个交换机更改为下一个交换机，则该方法可以回溯并尝试基于每批次增加的成本重新分配批次。
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公开(公告)号：US07653451B2
公开(公告)日：2010-01-26
申请号：US12023104
申请日：2008-01-31
IPC分类号： G09F19/00
CPC分类号： G05B19/41865 , G05B2219/31411 , G05B2219/32247 , G05B2219/32267 , G05B2219/32271 , G05B2219/32293 , G05B2219/45028 , Y02P90/20
摘要： Disclosed is a method of controlling a manufacturing system. The invention automatically monitors current levels of partially completed products waiting to be processed by a tool (or group of tools) and determines whether the current levels exceed a predetermined limit. If the current levels do exceed the predetermined limit, the invention performs an optimization process. However, if the current levels do not exceed the predetermined limit, the invention performs a dispatching process. In this dispatching process, the invention automatically projects future levels of partially completed products that will be supplied to the tool to identify a future work-in-process (WIP) bubble. The WIP bubble occurs when larger than normal amounts of partially completed products are supplied to the tool. The invention automatically adjusts the operating parameters of the tool based upon both the current levels and the future levels.
摘要翻译： 公开了一种控制制造系统的方法。 本发明自动监视等待由工具（或一组工具）处理的部分完成的产品的当前水平，并确定当前水平是否超过预定极限。 如果当前水平超过预定极限，本发明进行优化处理。 然而，如果当前电平不超过预定限度，则本发明执行调度处理。 在这个调度过程中，本发明会自动将未来的部分完成产品的水平提供给工具，以识别未来的在制品（WIP）泡沫。 当大于正常量的部分完成的产品被提供给工具时，会出现WIP气泡。 本发明基于当前水平和未来水平自动调整工具的操作参数。
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公开(公告)号：US20080140243A1
公开(公告)日：2008-06-12
申请号：US12023104
申请日：2008-01-31
IPC分类号： G06F17/00
CPC分类号： G05B19/41865 , G05B2219/31411 , G05B2219/32247 , G05B2219/32267 , G05B2219/32271 , G05B2219/32293 , G05B2219/45028 , Y02P90/20
摘要： Disclosed is a method of controlling a manufacturing system. The invention automatically monitors current levels of partially completed products waiting to be processed by a tool (or group of tools) and determines whether the current levels exceed a predetermined limit. If the current levels do exceed the predetermined limit, the invention performs an optimization process. However, if the current levels do not exceed the predetermined limit, the invention performs a dispatching process. In this dispatching process, the invention automatically projects future levels of partially completed products that will be supplied to the tool to identify a future work-in-process (WIP) bubble. The WIP bubble occurs when larger than normal amounts of partially completed products are supplied to the tool. The invention automatically adjusts the operating parameters of the tool based upon both the current levels and the future levels.
摘要翻译： 公开了一种控制制造系统的方法。 本发明自动监视等待由工具（或一组工具）处理的部分完成的产品的当前水平，并确定当前水平是否超过预定极限。 如果当前水平超过预定极限，本发明进行优化处理。 然而，如果当前电平不超过预定限度，则本发明执行调度处理。 在这个调度过程中，本发明会自动将未来的部分完成产品的水平提供给工具，以识别未来的在制品（WIP）泡沫。 当大于正常量的部分完成的产品被提供给工具时，会出现WIP气泡。 本发明基于当前水平和未来水平自动调整工具的操作参数。
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公开(公告)号：US07151972B2
公开(公告)日：2006-12-19
申请号：US10905456
申请日：2005-01-05
IPC分类号： G06F19/00
CPC分类号： G05B19/41865 , G05B2219/31411 , G05B2219/32247 , G05B2219/32267 , G05B2219/32271 , G05B2219/32293 , G05B2219/45028 , Y02P90/20
摘要： Disclosed is a method of controlling a manufacturing system. The invention automatically monitors current levels of partially completed products waiting to be processed by a tool (or group of tools) and determines whether the current levels exceed a predetermined limit. If the current levels do exceed the predetermined limit, the invention performs an optimization process. However, if the current levels do not exceed the predetermined limit, the invention performs a dispatching process. In this dispatching process, the invention automatically projects future levels of partially completed products that will be supplied to the tool to identify a future work-in-process (WIP) bubble. The WIP bubble occurs when larger than normal amounts of partially completed products are supplied to the tool. The invention automatically adjusts the operating parameters of the tool based upon both the current levels and the future levels.
摘要翻译： 公开了一种控制制造系统的方法。 本发明自动监视等待由工具（或一组工具）处理的部分完成的产品的当前水平，并确定当前水平是否超过预定极限。 如果当前水平超过预定极限，本发明进行优化处理。 然而，如果当前电平不超过预定限度，则本发明执行调度处理。 在这个调度过程中，本发明会自动将未来的部分完成产品的水平提供给工具，以识别未来的在制品（WIP）泡沫。 当大于正常量的部分完成的产品被提供给工具时，会出现WIP气泡。 本发明基于当前水平和未来水平自动调整工具的操作参数。
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公开(公告)号：US07349751B2
公开(公告)日：2008-03-25
申请号：US11538821
申请日：2006-10-05
IPC分类号： G06F19/00
CPC分类号： G05B19/41865 , G05B2219/31411 , G05B2219/32247 , G05B2219/32267 , G05B2219/32271 , G05B2219/32293 , G05B2219/45028 , Y02P90/20
摘要： Disclosed is a method of controlling a manufacturing system. The invention automatically monitors current levels of partially completed products waiting to be processed by a tool (or group of tools) and determines whether the current levels exceed a predetermined limit. If the current levels do exceed the predetermined limit, the invention performs an optimization process. However, if the current levels do not exceed the predetermined limit, the invention performs a dispatching process. In this dispatching process, the invention automatically projects future levels of partially completed products that will be supplied to the tool to identify a future work-in-process (WIP) bubble. The WIP bubble occurs when larger than normal amounts of partially completed products are supplied to the tool. The invention automatically adjusts the operating parameters of the tool based upon both the current levels and the future levels.
摘要翻译： 公开了一种控制制造系统的方法。 本发明自动监视等待由工具（或一组工具）处理的部分完成的产品的当前水平，并确定当前水平是否超过预定极限。 如果当前水平超过预定极限，本发明进行优化处理。 然而，如果当前电平不超过预定限度，则本发明执行调度处理。 在这个调度过程中，本发明会自动将未来的部分完成产品的水平提供给工具，以识别未来的在制品（WIP）泡沫。 当大于正常量的部分完成的产品被提供给工具时，会出现WIP气泡。 本发明基于当前水平和未来水平自动调整工具的操作参数。
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