公开(公告)号：US06515290B1

公开(公告)日：2003-02-04

申请号：US09654958

申请日：2000-09-05

申请人： Richard J. Rzeszut ,  James P. Quill

发明人： Richard J. Rzeszut ,  James P. Quill

IPC分类号： H01J2700

CPC分类号： H01J37/3171 ,  H01J37/08

摘要： A gas delivery system for an ion implantation system comprises a gas source at a first voltage potential and an ion source at a second voltage potential which is larger than the first voltage potential. The system further comprises an electrically insulative connector coupled between the gas source and the ion source. The present invention also comprises a method of delivering gas to an ion implantation system which comprises maintaining a voltage potential of a source gas at a storage location at a first voltage potential that is less than a second voltage potential at an ion source of the ion implantation system and delivering the source gas from the storage location to the ion source.

摘要翻译： 用于离子注入系统的气体输送系统包括处于第一电压电势的气体源和大于第一电压电位的第二电压电位的离子源。 该系统还包括耦合在气体源和离子源之间的电绝缘连接器。 本发明还包括将气体输送到离子注入系统的方法，该方法包括将离子注入离子源处的小于第二电压电位的第一电压电位的源气体的电位电位保持在存储位置 将源气体从储存位置输送到离子源。

公开(公告)号：US06180954B2

公开(公告)日：2001-01-30

申请号：US08862019

申请日：1997-05-22

申请人： Kevin R. Verrier ,  James P. Quill ,  A. Stuart Denholm

发明人： Kevin R. Verrier ,  James P. Quill ,  A. Stuart Denholm

IPC分类号： H05H1500

CPC分类号： H01J37/18 ,  H01J2237/31701

摘要： A dual walled exhaust assembly (28) is provided for an ion implantation system for connecting system components residing at differing voltage potentials. The assembly comprises a disposable corrugated inner tube (84) connected between inner mounting portions of a first end mount and a second end mount, and a permanent outer tube (82) connected between outer mounting portions of the first and second end mounts. The inner and outer tubes (84, 82) are constructed from polytetrafluoroethylene (PTFE), or some similar dielectric material with appropriate non-flammable properties. The inner corrugated surface of the tube (84) has a plurality of surfaces which are pitched downwardly toward an axis (87) of the inner tube to prevent contaminant accumulation. The corrugated surface also reduces the risk of arcing between the system components residing at differing voltage levels by effectively increasing the length of the ground path that a leakage current would need to traverse across the length of the tube. The outer tube provides a containment mechanism for containing the toxic effluent if the thinner inner wall should puncture, perhaps due to electrical discharge which might still occur as a result of contaminant build-up on the inner surface of the inner tube.

摘要翻译： 提供了一种双壁排气组件（28），用于离子注入系统，用于连接驻留在不同电压电位的系统组件。 组件包括连接在第一端部安装件和第二端部安装件的内部安装部分之间的一次性波纹内管（84）和连接在第一和第二端部安装件的外部安装部分之间的永久性外部管（82）。 内管和外管（84,82）由聚四氟乙烯（PTFE）或具有适当的非易燃性质的一些相似的介电材料制成。 管（84）的内部波纹状表面具有向内侧向下倾斜的多个表面，以防止污染物积聚。 波纹表面还通过有效地增加泄漏电流需要穿过管的长度的接地路径的长度来降低驻留在不同电压水平的系统组件之间的电弧的风险。 如果较薄的内壁应该穿刺，外管可以提供容纳有毒污染物的容纳机构，这可能是由于内管内表面上的污染物积聚而可能发生的放电。

公开(公告)号：US06485534B2

公开(公告)日：2002-11-26

申请号：US09742910

申请日：2000-12-20

申请人： James P. Quill

发明人： James P. Quill

IPC分类号： B01D4512

CPC分类号： H01J37/32844 ,  B01D45/16 ,  B04C5/103 ,  B04C5/12 ,  Y02C20/30

摘要： An evacuation system for a chamber (14) is provided, including a pump (12) for removing gases and contaminants from the chamber. The pump has an outlet (32) connected to an exhaust duct (34). A collector trap (42) for use in collecting contaminants evacuated from the chamber is positioned between the pump outlet (32) and the exhaust duct (34). The collector trap (42) comprises: (i) a gas/contaminant separator (46) having an inlet (56) for introducing gases and contaminants therein, the separator (46) functioning to physically separate the gases and contaminants; (ii) a contaminant collector (48) for collecting the separated contaminants, the collector (48) including an extractor coupling (70) for allowing extraction of the contaminants from the collector; and (iii) an outlet (72) for allowing the separated gases to exit the gas/contaminant separator (46) and into the exhaust duct (34).

摘要翻译： 提供了一种用于腔室（14）的抽空系统，包括用于从腔室去除气体和污染物的泵（12）。 泵具有连接到排气管道（34）的出口（32）。 用于收集从室排出的污染物的收集阱（42）位于泵出口（32）和排气管道（34）之间。 收集阱（42）包括：（i）气体/污染物分离器（46），其具有用于在其中引入气体和污染物的入口（56），所述分离器（46）用于物理地分离气体和污染物; （ii）用于收集分离的污染物的污染物收集器（48），所述收集器（48）包括用于允许从所述收集器抽出污染物的抽出器联接器（70） 和（iii）用于允许分离的气体离开气体/污染物分离器（46）并进入排气管道（34）的出口（72）。