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公开(公告)号：US10315917B2
公开(公告)日：2019-06-11
申请号：US15864070
申请日：2018-01-08
申请人： Robert Bosch GmbH
发明人： Andreas Krauss , Elisabeth Preiss
摘要： A micromechanical sensor device and a corresponding manufacturing method. The micromechanical sensor device is equipped with a substrate which includes a diaphragm area, multiple sensor layer areas being formed on the diaphragm area, which have a particular structured sensor layer; and a particular electrode device, via which the sensor layer areas are electrically connectable outside of the diaphragm area, the sensor layer areas being structured in such a way that they have length and width dimensions of a magnitude between 1 and 10 micrometers.
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公开(公告)号：US11414319B2
公开(公告)日：2022-08-16
申请号：US16613939
申请日：2018-05-08
申请人： Robert Bosch GmbH
发明人： Andreas Krauss , Elisabeth Preiss
摘要： A method for producing a nanocrystalline, gas-sensitive layer structure. The method for producing a nanocrystalline, gas-sensitive layer structure on a substrate comprises the steps: depositing a base layer made of a base material; depositing a doping layer made of a doping material; repeating the preceding steps; and performing a tempering step, whereby a gas-sensitive, nanocrystalline layer structure is produced.
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公开(公告)号：US20210363004A1
公开(公告)日：2021-11-25
申请号：US16613939
申请日：2018-05-08
申请人： Robert Bosch GmbH
发明人： Andreas Krauss , Elisabeth Preiss
摘要： A method for producing a nanocrystalline, gas-sensitive layer structure. The method for producing a nanocrystalline, gas-sensitive layer structure on a substrate comprises the steps: depositing a base layer made of a base material; depositing a doping layer made of a doping material; repeating the preceding steps; and performing a tempering step, whereby a gas-sensitive, nanocrystalline layer structure is produced.
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4.发明申请公开(公告)号：US20180194617A1
公开(公告)日：2018-07-12
申请号：US15864070
申请日：2018-01-08
申请人： Robert Bosch GmbH
发明人： Andreas Krauss , Elisabeth Preiss
CPC分类号： B81C1/00158 , B81B3/0081 , B81B2201/0214 , G01N27/128 , G01N27/14 , G01N33/0009 , G01N33/0013
摘要： A micromechanical sensor device and a corresponding manufacturing method. The micromechanical sensor device is equipped with a substrate which includes a diaphragm area, multiple sensor layer areas being formed on the diaphragm area, which have a particular structured sensor layer; and a particular electrode device, via which the sensor layer areas are electrically connectable outside of the diaphragm area, the sensor layer areas being structured in such a way that they have length and width dimensions of a magnitude between 1 and 10 micrometers.
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