公开(公告)号：US06251150B1

公开(公告)日：2001-06-26

申请号：US09321036

申请日：1999-05-27

Applicant: Robert James Small ,  Maria Louise Peterson ,  Tuan Troung ,  Lionel Bonneau ,  Jean Claude Drouget

Inventor： Robert James Small ,  Maria Louise Peterson ,  Tuan Troung ,  Lionel Bonneau ,  Jean Claude Drouget

IPC: C09K314

CPC classification number: C09K3/1427 ,  C09K3/1463

Abstract: The present invention provides a slurry composition for chemical mechanical polishing comprising spinel particles having the formula AO•xZ2O3 wherein A is at least one divalent cation, Z is at least one trivalent cation, and 0.01≦x≦100. The present invention also includes a method of chemical mechanical polishing the surface of a substrate using slurry compositions that include these spinel particles. The slurry compositions of the present invention provide the desired level of planarization and selectivity for both metal and oxide surfaces. In addition, the slurry compositions of the invention can be prepared such that they are substantially free of alpha phase alumina particles and other high hardness particles to produce a scratch-free polished surface.

Abstract translation: 本发明提供一种用于化学机械抛光的浆料组合物，其包含具有式AO.xZ 2 O 3的尖晶石颗粒，其中A是至少一个二价阳离子，Z是至少一个三价阳离子，0.01 <= x <= 100。 本发明还包括使用包括这些尖晶石颗粒的浆料组合物化学机械抛光基材表面的方法。 本发明的浆料组合物为金属和氧化物表面提供所需的平坦化和选择性水平。 此外，可以制备本发明的浆料组合物，使得它们基本上不含α相氧化铝颗粒和其它高硬度颗粒以产生无刮擦的抛光表面。

公开(公告)号：US4120819A

公开(公告)日：1978-10-17

申请号：US833506

申请日：1977-09-15

Applicant: Robert James Small

Inventor： Robert James Small

IPC: B01J23/96 ,  B01J21/20 ,  C07C103/32

CPC classification number: B01J23/96 ,  C07C241/02 ,  Y02P20/584

Abstract: Palladium or platinum catalyst values poisoned in course of catalyzing the reductive alkylation of an acid hydrazide are essentially completely reactivated by treating the spent catalyst values with a dilute aqueous solution of a lower monocarboxylic acid or a mineral acid and contacting the resultant slurry with oxygen gas or a labile oxygen containing compound.

Abstract translation: 在催化酸酰肼的还原烷基化过程中中毒的钯或铂催化剂值基本上通过用较低一元羧酸或无机酸的稀水溶液处理废催化剂值而完全再活化，并使所得浆料与氧气或 不稳定的含氧化合物。