公开(公告)号：US06478877B1

公开(公告)日：2002-11-12

申请号：US09757612

申请日：2001-01-11

申请人： Roger S. Sillmon ,  Khang V. Nguyen

发明人： Roger S. Sillmon ,  Khang V. Nguyen

IPC分类号： C23C1600

CPC分类号： C30B25/14 ,  C23C16/4412

摘要： A gas collector is disclosed for use with epitaxial reactors. The gas collector is in the form of a base and top portion that are interconnected by means of a sealing arrangement. The top portion is configured to cover the base and define a conduit therebetween. Inlets and outlets are provided to direct chemical vapors from a reaction chamber of the epitaxial reactor into the conduit and further into an exhaust pipe of the epitaxial reactor. The gas collector is capable of forming a hermetic seal with the lid of the reaction chamber in order to prevent escape of chemical vapors.

摘要翻译： 公开了一种用于外延反应器的气体收集器。 气体收集器是通过密封装置相互连接的基部和顶部的形式。 顶部构造成覆盖基部并在其间限定导管。 提供入口和出口以将来自外延反应器的反应室的化学蒸气引导到导管中，并进一步引导到外延反应器的排气管中。 气体收集器能够与反应室的盖形成气密密封，以防止化学蒸气逸出。

公开(公告)号：US06597112B1

公开(公告)日：2003-07-22

申请号：US09635671

申请日：2000-08-10

申请人： Roger S. Sillmon

发明人： Roger S. Sillmon

IPC分类号： H01J4006

CPC分类号： H01J40/06

摘要： A method of manufacturing a photocathode includes forming a seed layer with a single crystal structure on a faceplate; forming a window layer over the seed layer; and forming an active layer over the window layer. The method can also include the step of cleaning the faceplate before the seed layer is formed. The steps of cleaning the faceplate, forming the seed layer, forming the window layer and forming the active layer are performed in an organometallic chemical vapor deposition reactor system. The seed layer is formed by depositing a buffer layer on the faceplate and annealing the buffer layer to form the seed layer having. The atmosphere during the annealing of the buffer layer includes hydrogen, arsine, trimethylaluminum, and trimethylgallium. A photocathode formed from the method is also disclosed.

摘要翻译： 光电阴极的制造方法包括在面板上形成具有单晶结构的种子层; 在种子层上形成窗口层; 并在窗口层上形成有源层。 该方法还可以包括在种子层形成之前清洁面板的步骤。 在有机金属化学气相沉积反应器系统中进行清洁面板，形成种子层，形成窗口层并形成活性层的步骤。 种子层通过在面板上沉积缓冲层并对缓冲层退火以形成具有的种子层而形成。 缓冲层退火过程中的气氛包括氢，胂，三甲基铝和三甲基镓。 还公开了由该方法形成的光电阴极。

公开(公告)号：US06325855B1

公开(公告)日：2001-12-04

申请号：US09635268

申请日：2000-08-09

申请人： Roger S. Sillmon ,  Khang V. Nguyen

发明人： Roger S. Sillmon ,  Khang V. Nguyen

IPC分类号： C23C1600

CPC分类号： C30B25/14 ,  C23C16/4412

摘要： A gas collector is disclosed for use with epitaxial reactors. The gas collector is in the form of a base and top portion that are interconnected by means of a sealing arrangement. The top portion is configured to cover the base and define a conduit therebetween. Inlets and outlets are provided to direct chemical vapors from a reaction chamber of the epitaxial reactor into the conduit and further into an exhaust pipe of the epitaxial reactor. The gas collector is capable of forming a hermetic seal with the lid of the reaction chamber in order to prevent escape of chemical vapors.

摘要翻译： 公开了一种用于外延反应器的气体收集器。 气体收集器是通过密封装置相互连接的基部和顶部的形式。 顶部构造成覆盖基部并在其间限定导管。 提供入口和出口以将来自外延反应器的反应室的化学蒸气引导到导管中，并进一步引导到外延反应器的排气管中。 气体收集器能够与反应室的盖形成气密密封，以防止化学蒸气逸出。

公开(公告)号：US06998635B2

公开(公告)日：2006-02-14

申请号：US10443564

申请日：2003-05-22

申请人： Roger S. Sillmon ,  Arlynn W. Smith ,  Rudy G. Benz

发明人： Roger S. Sillmon ,  Arlynn W. Smith ,  Rudy G. Benz

IPC分类号： H01L29/12

CPC分类号： H01J31/506 ,  H01J1/34 ,  H01J9/12 ,  H01J43/08

摘要： A photocathode includes a first layer having a first energy band gap for providing absorption of light of wavelengths shorter than or equal to a first wavelength, a second layer having a second energy band gap for providing transmission of light of wavelengths longer than the first wavelength, and a third layer having a third energy band gap for providing absorption of light of wavelengths between the first wavelength and a second wavelength. The first wavelength is shorter than the second wavelength. The first, second and third layers are positioned in sequence between input and output sides of the photocathode.

摘要翻译： 光电阴极包括具有用于提供短于或等于第一波长的波长的光的吸收的第一能带隙的第一层，具有用于提供长于第一波长的波长的光的透射的第二能带隙的第二层， 以及具有用于提供第一波长和第二波长之间的波长的光的吸收的第三能带隙的第三层。 第一波长比第二波长短。 第一层，第二层和第三层依次位于光电阴极的输入和输出侧之间。

公开(公告)号：US06325390B1

公开(公告)日：2001-12-04

申请号：US08907662

申请日：1997-08-08

申请人： Roger S. Sillmon

发明人： Roger S. Sillmon

IPC分类号： F16L1700

CPC分类号： F16L23/22 ,  F16L23/003

摘要： A fixture for centering and holding an elastomeric O-ring in position between vacuum sealing flanges during assembly and use thereof, having an annular body defining an outer surface and O-ring holding flange disposed on the outer surface for holding an elastomeric O-ring. The outer surface of the annular body defines a pair of beveled surfaces which enable the fixture to be inserted between the vacuum sealing flanges during assembly thereof without any substantial binding. The annular body of the fixture also defines a cylindrical inner surface having a diameter which is substantially identical to the diameter of the cylindrical inner surfaces of the sealing flanges to substantially prevent turbulent gas flow effects.

摘要翻译： 一种用于在组装和使用期间将弹性O形环定中心并保持在真空密封凸缘之间的位置的夹具，其具有限定外表面的环形体和设置在外表面上的用于保持弹性O形环的O形圈保持凸缘。 环形体的外表面限定了一对倾斜的表面，这使得固定装置能够在其组装期间插入到真空密封凸缘之间，而没有任何实质的结合。 固定装置的环形体还限定了圆柱形内表面，该内表面的直径基本上与密封凸缘的圆柱形内表面的直径相同，以基本上防止湍流气流的影响。