公开(公告)号：US06583558B1

公开(公告)日：2003-06-24

申请号：US09868883

申请日：2001-06-22

申请人： Motohiro Suyama ,  Akihiro Kageyama ,  Masaharu Muramatsu

发明人： Motohiro Suyama ,  Akihiro Kageyama ,  Masaharu Muramatsu

IPC分类号： H01J4006

CPC分类号： H01J29/44 ,  H01J31/26 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/10155 ,  H01L2924/00014

摘要： An electron tube 10 mainly includes a sleeve 12, an input plate 14 having a photocathode surface 18, a stem 16 and a CCD 20. A vacuum is provided in an interior of the electron tube 10. The CCD 20 is fixed onto the stem such that a rear surface B faces the photocathode surface 18. In the CCD 20, on a single conductive type semiconductor substrate 64, a buried layer 66, a barrier region 68, a SiO2 layer 70, a storage electrode layer 72, a transmission electrode layer 74, and a barrier electrode layer 76 are formed at their predetermined positions. A PSG film 78 is formed at an entire front surface A over these layers to flatten the surface of the CCD 20. Further, SiN film 106 mainly composed of SiN is formed above the PSG film over the entire front surface A.

摘要翻译： 电子管10主要包括套管12，具有光电阴极表面18的输入板14，杆16和CCD 20.在电子管10的内部设有真空。CCD 20固定在杆上 后表面B面对光电面表面18.在CCD 20中，在单个导电型半导体衬底64上，掩埋层66，势垒区68，SiO 2层70，存储电极层72，透射电极层 74和阻挡电极层76形成在其预定位置。 在这些层的整个前表面A上形成PSG膜78，以平坦化CCD 20的表面。此外，主要由SiN构成的SiN膜106在整个前表面A上形成在PSG膜的上方。

公开(公告)号：US06828574B1

公开(公告)日：2004-12-07

申请号：US09634258

申请日：2000-08-08

申请人： Paul C. Allen

发明人： Paul C. Allen

IPC分类号： H01J4006

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  G03F7/70291 ,  G03F7/70375 ,  H01J37/3177 ,  H01J2237/31779

摘要： The present invention provides a source of multiple beams of electrons having a desired spatial pattern, as typically used for multiple beam lithography. A source of radiation, typically ultraviolet radiation, is directed onto a modulator and from the modulator onto a photocathode. The modulator, typically a spatial light modulator, imposes a spatial pattern onto the radiation. The pattern imposed onto the radiation is transmitted to the multiple beams of electrons as such beams are generated by the photocathode. An electron beam lithography system having higher throughput than conventional single beam systems is one result. Methods of creating multiple electron beams and methods of patterning targets with such multiple beams of electrons are also described. A micromirror array is a preferred modulator. Mercury arc lamp directing ultraviolet radiation by means of the modulator onto a cesium telluride photocathode is a preferred combination of radiation source and photocathode.

摘要翻译： 本发明提供了具有期望的空间图案的多束电子束的源，如通常用于多光束光刻的。 辐射源（通常是紫外线辐射）被引导到调制器上并且从调制器引导到光电阴极上。 调制器（通常为空间光调制器）将空间图案施加到辐射上。 施加到辐射上的图案被传输到多个电子束，因为这些光束是由光电阴极产生的。 具有比常规单束系统更高生产量的电子束光刻系统是一个结果。 还描述了产生多个电子束的方法和用这种多个电子束图案化靶的方法。 微镜阵列是优选的调制器。 通过调制器将紫外线辐射引导到碲化铯光电阴极上的汞弧灯是辐射源和光电阴极的优选组合。

公开(公告)号：US06765352B2

公开(公告)日：2004-07-20

申请号：US10343229

申请日：2003-01-30

申请人： Akihiko Ohtomo ,  Tsuneo Ihara ,  Kuniyoshi Mori ,  Yoshiyuki Natsume

发明人： Akihiko Ohtomo ,  Tsuneo Ihara ,  Kuniyoshi Mori ,  Yoshiyuki Natsume

IPC分类号： H01J4006

CPC分类号： H01J43/28 ,  H01J43/08 ,  H01J2231/5016

摘要： A photocathode and an electron tube in which the photocathode plate can be securely fixed without using any adhesive. Even under the severe condition that a high vibration resistance is required or thermal stress occurs because of great temperature variation, it can be used widely for an image intensifier, a streak tube, or a photomultiplier. The photocathode plate of the photocathode is sandwiched between a faceplate and a support plate. First pins embedded in the faceplate are joined to the support plate. Therefore, the photocathode plate can be readily fixed securely to the faceplate without using any adhesive.

摘要翻译： 光电阴极和电子管，其中光电阴极板可以牢固地固定而不使用任何粘合剂。 即使在需要高抗振性或由于温度变化大而产生热应力的严酷条件下，也可以广泛用于图像增强器，条纹管或光电倍增管。 光电阴极的光电阴极板被夹在面板和支撑板之间。 嵌入在面板中的第一个销被连接到支撑板。 因此，光电阴极板可以容易地固定在面板上而不使用任何粘合剂。

公开(公告)号：US06628072B2

公开(公告)日：2003-09-30

申请号：US09855043

申请日：2001-05-14

申请人： Richard A. Craig ,  Mary Bliss

发明人： Richard A. Craig ,  Mary Bliss

IPC分类号： H01J4006

CPC分类号： B82Y10/00 ,  H01J1/34 ,  H01J43/08

摘要： A method and apparatus for increasing the quantum efficiency of a photomultiplier tube by providing a photocathode with an increased surface-to-volume ratio. The photocathode includes a transparent substrate, upon one major side of which is formed one or more large aspect-ratio structures, such as needles, cones, fibers, prisms, or pyramids. The large aspect-ratio structures are at least partially composed of a photoelectron emitting material, i.e., a material that emits a photoelectron upon absorption of an optical photon. The large aspect-ratio structures may be substantially composed of the photoelectron emitting material (i.e., formed as such upon the surface of a relatively flat substrate) or be only partially composed of a photoelectron emitting material (i.e., the photoelectron emitting material is coated over large aspect-ratio structures formed from the substrate material itself.) The large aspect-ratio nature of the photocathode surface allows for an effective increase in the thickness of the photocathode relative the absorption of optical photons, thereby increasing the absorption rate of incident photons, without substantially increasing the effective thickness of the photocathode relative the escape incidence of the photoelectrons.

公开(公告)号：US06531816B1

公开(公告)日：2003-03-11

申请号：US09423278

申请日：1999-11-04

申请人： Amos Breskin ,  Rachel Chechik ,  Alexei Buzulutskov

发明人： Amos Breskin ,  Rachel Chechik ,  Alexei Buzulutskov

IPC分类号： H01J4006

CPC分类号： H01J1/34 ,  H01J2201/3426

摘要： This invention discloses a thin-film-coated photocathode, including a photocathode formed of first material consisting of potassium cesiuin antimonide and a thin-film coating of a second material consisting of cesium bromide (CsBr).

摘要翻译： 本发明公开了一种薄膜涂覆的光电阴极，其包括由铯氯化镉组成的第一材料和由溴化铯（CsBr）组成的第二材料的薄膜涂层形成的光电阴极。

公开(公告)号：US06597112B1

公开(公告)日：2003-07-22

申请号：US09635671

申请日：2000-08-10

申请人： Roger S. Sillmon

发明人： Roger S. Sillmon

IPC分类号： H01J4006

CPC分类号： H01J40/06

摘要： A method of manufacturing a photocathode includes forming a seed layer with a single crystal structure on a faceplate; forming a window layer over the seed layer; and forming an active layer over the window layer. The method can also include the step of cleaning the faceplate before the seed layer is formed. The steps of cleaning the faceplate, forming the seed layer, forming the window layer and forming the active layer are performed in an organometallic chemical vapor deposition reactor system. The seed layer is formed by depositing a buffer layer on the faceplate and annealing the buffer layer to form the seed layer having. The atmosphere during the annealing of the buffer layer includes hydrogen, arsine, trimethylaluminum, and trimethylgallium. A photocathode formed from the method is also disclosed.

摘要翻译： 光电阴极的制造方法包括在面板上形成具有单晶结构的种子层; 在种子层上形成窗口层; 并在窗口层上形成有源层。 该方法还可以包括在种子层形成之前清洁面板的步骤。 在有机金属化学气相沉积反应器系统中进行清洁面板，形成种子层，形成窗口层并形成活性层的步骤。 种子层通过在面板上沉积缓冲层并对缓冲层退火以形成具有的种子层而形成。 缓冲层退火过程中的气氛包括氢，胂，三甲基铝和三甲基镓。 还公开了由该方法形成的光电阴极。

公开(公告)号：US06465938B2

公开(公告)日：2002-10-15

申请号：US09962660

申请日：2001-09-25

申请人： Michael Jude Iosue

发明人： Michael Jude Iosue

IPC分类号： H01J4006

CPC分类号： H01J31/507 ,  H01J2231/50015 ,  H01J2231/50063

摘要： An image intensifier tube includes a photocathode (20) with an active layer (52) providing an electrical spectral response to photons of light. The photocathode (20) also includes integral spacer structure (42) which extends toward and physically touches a microchannel plate (22) of the image intensifier tube in order to establish and maintain a desirably precise and fine-dimension spacing distance “G” between the photocathode and the microchannel plate. A method of making the photocathode and a method of making the image intensifier tube are described also.

摘要翻译： 图像增强管包括具有向光子的光子提供电光响应的有源层（52）的光电阴极（20）。 光电阴极（20）还包括一体化间隔物结构（42），其朝向和物理接触图像增强管的微通道板（22）延伸，以便建立并保持理想的精确和精细尺寸间隔距离“G” 光电阴极和微通道板。 还描述了制造光电阴极的方法和制造图像增强管的方法。

公开(公告)号：US06448568B1

公开(公告)日：2002-09-10

申请号：US09365604

申请日：1999-07-30

申请人： Paul C. Allen ,  Xiaolan Chen ,  Douglas E. Holmgren ,  Samuel C. Howells

发明人： Paul C. Allen ,  Xiaolan Chen ,  Douglas E. Holmgren ,  Samuel C. Howells

IPC分类号： H01J4006

CPC分类号： B82Y10/00 ,  G03F7/70325 ,  G03F7/70375 ,  G03F7/70808 ,  H01J37/073 ,  H01J2237/3175

摘要： A lithography apparatus including both a laser beam source and an electron beam column, where the electron beam column has a support(in one embodiment a window in the column housing) having an index of refraction n. The support, having a photocathode source material disposed on its remote surface, is located in some embodiments such that the internal angle of the incident laser beam is &thgr; with respect to a line perpendicular to the remote surface. The numerical aperture of the substrate(equal to nsin &thgr;) is greater than one in one embodiment, resulting in a high resolution spot size diameter incident on the photocathode source material at the remote surface. Incident energy from the laser beam thereby emits a corresponding high resolution electron beam from the photocathode source material. Electromagnetic lens components are disposed downstream in the electron beam column to demagnify the electron beam. This apparatus allows the continuously decreasing minimum feature dimension sizes for semiconductor electron beam lithography.

摘要翻译： 包括激光束源和电子束列的光刻设备，其中电子束柱具有折射率n的支撑（在一个实施例中为柱壳体中的窗口）。 具有设置在其远程表面上的光电阴极源材料的支撑件位于一些实施例中，使得入射激光束的内角相对于垂直于远程表面的线是θ。 在一个实施例中，衬底的数值孔径（等于nsinθ）大于一个，导致入射到远端表面的光电阴极源材料上的高分辨率光斑尺寸直径。 因此来自激光束的入射能量由此从光电阴极源材料发射出相应的高分辨率电子束。 电磁透镜部件设置在电子束列的下游，以使电子束缩小。 该装置允许连续减小用于半导体电子束光刻的最小特征尺寸尺寸。

公开(公告)号：US06376985B2

公开(公告)日：2002-04-23

申请号：US09052903

申请日：1998-03-31

申请人： Kim Y. Lee ,  Tai-Hon Philip Chang ,  Marian Mankos ,  C. Neil Berglund

发明人： Kim Y. Lee ,  Tai-Hon Philip Chang ,  Marian Mankos ,  C. Neil Berglund

IPC分类号： H01J4006

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/70375 ,  H01J1/34 ,  H01J37/073 ,  H01J2237/31779

摘要： A photocathode having a gate electrode so that modulation of the resulting electron beam is accomplished independently of the laser beam. The photocathode includes a transparent substrate, a photoemitter, and an electrically separate gate electrode surrounding an emission region of the photoemitter. The electron beam emission from the emission region is modulated by voltages supplied to the gate electrode. In addition, the gate electrode may have multiple segments that are capable of shaping the electron beam in response to voltages supplied individually to each of the multiple segments.

摘要翻译： 具有栅极的光电阴极，使得所得电子束的调制独立于激光束而实现。 光电阴极包括透明基板，光电发射器和围绕发光体的发射区域的电分离的栅电极。 来自发射区域的电子束发射由供给栅电极的电压调制。 此外，栅电极可以具有多个段，其能够响应于单独提供给多个段中的每一个的电压而使电子束成形。

公开(公告)号：US06759800B1

公开(公告)日：2004-07-06

申请号：US09363926

申请日：1999-07-29

申请人： Andres Fernandez ,  Timothy Thomas ,  Xiaolan Chen ,  Steven T. Coyle ,  Ming Yu ,  Marian Mankos

发明人： Andres Fernandez ,  Timothy Thomas ,  Xiaolan Chen ,  Steven T. Coyle ,  Ming Yu ,  Marian Mankos

IPC分类号： H01J4006

CPC分类号： B82Y10/00 ,  H01J1/34

摘要： A photocathode as a source of electron beams, having a substrate of optically transmissive diamond and a photoemitter. A photocathode with a single emitting region provides a single electron beam; a photocathode with multiple emitting regions provides multiple electron beams. The photoemitter is positioned on the side of the diamond substrate opposite the surface on which the illumination is incident, and has an irradiation region at the contact with the optically transmissive diamond, and an emission region opposite the irradiation region, these regions being defined by the path of the illumination. The diamond substrate at the irradiation region/emission region interface conducts heat away from this focused region of illumination on the photocathode. Alternately, a diamond film is used for heat conduction, while another material is used as a substrate to provide structural support. The thermal conductivity of diamond is at least three orders of magnitude greater than that of fused silica, which is an alternative substrate material for photocathodes. This allows for efficient conduction of heat away from the irradiation region/emission region interface, and therefore allows higher currents to be achieved from the photocathode. This, in turn, permits higher throughput rates in applications including electron beam lithography.

摘要翻译： 作为电子束源的光电阴极，具有透光金刚石和光电发射体的基底。 具有单个发射区域的光电阴极提供单个电子束; 具有多个发射区域的光电阴极提供多个电子束。 光发射器位于与照射入射的表面相对的金刚石基底的一侧，并且具有与光学透射金刚石接触的照射区域和与照射区域相对的发射区域，这些区域由 照明路径。 在照射区域/发射区域界面处的金刚石基底将热量远离该聚焦照明区域在光电阴极上。 或者，金刚石膜用于热传导，而另一种材料用作基底以提供结构支撑。 金刚石的热导率比熔融石英的热导率高至少三个数量级，熔融石英是光电阴极的替代基材。 这允许热量从照射区域/发射区域界面有效地传导，因此允许从光电阴极获得更高的电流。 这反过来又允许在包括电子束光刻的应用中更高的生产率。