公开(公告)号：US20040250767A1

公开(公告)日：2004-12-16

申请号：US10828952

申请日：2004-04-21

Applicant: Rohm and Haas Electronic Materials, L.L.C.

Inventor： Marc Langlois ,  Anthony A. Cox

IPC: C23C016/00

CPC classification number: C23C16/042 ,  C23C16/453

Abstract: A method and apparatus for coating a surface of a substrate using combustion chemical vapor deposition is disclosed. A chemical vapor deposition stream, composed of a coating precursor and a combustible medium, is directed toward a substrate and combusted to provide a reacted coating precursor in a gaseous plume. The plume is modified by exposing it to a shield prior to the plume contacting the surface of the substrate and depositing a coating thereon. The shield serves to control the coating thickness and material characteristics of the deposited material.

Abstract translation: 公开了一种使用燃烧化学气相沉积涂覆基板表面的方法和装置。 由涂料前体和可燃介质组成的化学气相沉积物流被引向衬底并燃烧，从而在气态羽流中提供反应的涂层前体。 羽毛通过在羽毛接触基底表面并在其上沉积涂层之前将其暴露于屏蔽来进行修饰。 屏蔽件用于控制沉积材料的涂层厚度和材料特性。