公开(公告)号：US06476388B1

公开(公告)日：2002-11-05

申请号：US09421093

申请日：1999-10-19

申请人： Ryo Nakagaki ,  Yuji Takagi ,  Atsushi Shimoda ,  Kenji Obara ,  Yasuhiko Ozawa ,  Hideka Bamba ,  Seiji Isogai ,  Kenji Watanabe ,  Chie Shishido ,  Toshiei Kurosaki

发明人： Ryo Nakagaki ,  Yuji Takagi ,  Atsushi Shimoda ,  Kenji Obara ,  Yasuhiko Ozawa ,  Hideka Bamba ,  Seiji Isogai ,  Kenji Watanabe ,  Chie Shishido ,  Toshiei Kurosaki

IPC分类号： G21K700

CPC分类号： G01N23/225 ,  H01J37/222 ,  H01J37/265 ,  H01J2237/24495 ,  H01J2237/2485 ,  H01J2237/2817

摘要： The invention is a scanning electron microscope including a switching control unit for controlling to switch at least scanning unit to switch a digital image signal of a low magnification based on a wide image taking field of view to and from a digital image signal of a high magnification based on a narrow image taking field of view from an A/D conversion unit and a beam spot diameter control unit for controlling to switch a spot diameter of electron beam on a surface of an object substrate in controlling to switch the signals by the switching control unit and a defect portion analyzing method using the scanning electron microscope.

摘要翻译： 本发明是一种扫描电子显微镜，其特征在于，具备切换控制部，该切换控制部基于与高倍率的数字图像信号相对应的宽拍摄视场，至少切换扫描部，切换低倍率的数字图像信号 基于来自A / D转换单元的窄图像拍摄视场和光束光斑直径控制单元，用于控制通过切换控制切换信号来控制在对象基板的表面上切换电子束的光斑直径 单元和使用扫描电子显微镜的缺陷部分析方法。