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公开(公告)号:US20240145219A1
公开(公告)日:2024-05-02
申请号:US18331333
申请日:2023-06-08
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Min Gyu PARK , Sae Hong KIM , Jung Gon KIM , Kyung Joo MIN , Hee Yong LEE , Suk Jin JANG , Choel Min JANG
IPC: H01J37/32 , C23C16/30 , C23C16/455
CPC classification number: H01J37/32449 , C23C16/30 , C23C16/45563 , H01J37/32458 , H01J2237/3321
Abstract: An apparatus for manufacturing a display device includes a gas exhaust unit and a gas spray unit. The gas exhaust unit includes first and second sidewalls disposed side by side along a first direction, and an upper plate disposed on the first and second sidewalls, a first partition disposed between the first and second sidewalls and extending away from a lower surface of the upper plate in a second direction. The gas spray unit includes first and second spray portions spraying first and second gases in the second direction. The first partition includes first and second surfaces, a third surface connecting the first surface to the second surface, first and second horizontal openings formed at the first and second surfaces, a first vertical opening formed at the third surface, and a first sub exhaust path connecting the first and second horizontal openings, and the first vertical opening with each other.