公开(公告)号：US11351632B2

公开(公告)日：2022-06-07

申请号：US16191575

申请日：2018-11-15

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jaebum Pahk ,  Jeongho Yi ,  Dokyun Kwon ,  Kyongho Hong ,  Jihun Kang ,  Cheollae Roh ,  Gyoowan Han

IPC: B23K26/142 ,  B23K26/14 ,  B23K26/16 ,  B23K26/38 ,  B23K26/402 ,  B23K37/04 ,  B23K101/36

Abstract: A particle removal device includes: a stage on which a target substrate is disposed; an inner case defining a first discharge opening through which the stage is exposed to an internal space of the inner case; an outer case including: a side wall portion surrounding the inner case, a protrusion portion protruded from the side wall portion toward the inner case, and a second discharge opening in fluid connection with the first discharge opening; a suction pump connected to the second discharge opening; an air injector in fluid connection with the internal space; and an intake opening in fluid connection with the first and second discharge openings. A width of the intake opening as a distance between the distal end of the inner case and the distal end of the protrusion portion is smaller than a width of the first discharge opening.