SHEET TRANSFER APPARATUS AND METHOD FOR TRANSFERRING SHEET USING THE SAME

    公开(公告)号:US20200002111A1

    公开(公告)日:2020-01-02

    申请号:US16567488

    申请日:2019-09-11

    Abstract: A sheet transfer apparatus and a method for transferring a sheet using a sheet transfer apparatus are provided. A sheet transfer apparatus includes: a table on which two or more sheets, which are continuously laminated, are configured to be seated; a sheet adsorbing part on the table to adsorb a first sheet, which is at an uppermost portion, of the two or more laminated sheets at a pressure; and an air discharge part on the table and adjacent to the sheet adsorbing part, and the air discharge part is configured to discharge air to a surface of the first sheet adsorbed to the sheet adsorbing part.

    MASK ASSEMBLY FOR THIN FILM DEPOSITION
    3.
    发明申请
    MASK ASSEMBLY FOR THIN FILM DEPOSITION 审中-公开
    薄膜沉积掩模组件

    公开(公告)号:US20160296966A1

    公开(公告)日:2016-10-13

    申请号:US14882902

    申请日:2015-10-14

    Abstract: A mask assembly for thin film deposition includes: a mask frame including an opening, the mask frame disposed surrounding the opening; and a mask unit including: first masks mounted on the mask frame, the first masks extending in a first direction; a second mask disposed on the first masks, the second mask including: one open hole; and at least one foreign substance discharge hole; and a third mask disposed on the second mask, the third mask extending in a second direction and including deposition holes, wherein the second direction crosses the first direction, and wherein a substrate is disposed on the third mask.

    Abstract translation: 用于薄膜沉积的掩模组件包括:掩模框架,其包括开口,所述掩模框架围绕所述开口设置; 以及掩模单元,包括:安装在所述掩模框架上的第一掩模,所述第一掩模沿第一方向延伸; 设置在所述第一掩模上的第二掩模,所述第二掩模包括:一个开孔; 和至少一个异物排出孔; 以及设置在所述第二掩模上的第三掩模,所述第三掩模在第二方向上延伸并且包括沉积孔,其中所述第二方向跨越所述第一方向,并且其中在所述第三掩模上设置衬底。

    Sheet transfer apparatus and method for transferring sheet using the same

    公开(公告)号:US10427898B2

    公开(公告)日:2019-10-01

    申请号:US16004003

    申请日:2018-06-08

    Abstract: A sheet transfer apparatus and a method for transferring a sheet using a sheet transfer apparatus are provided. A sheet transfer apparatus includes: a table on which two or more sheets, which are continuously laminated, are configured to be seated; a sheet adsorbing part on the table to adsorb a first sheet, which is at an uppermost portion, of the two or more laminated sheets at a pressure; and an air discharge part on the table and adjacent to the sheet adsorbing part, and the air discharge part is configured to discharge air to a surface of the first sheet adsorbed to the sheet adsorbing part.

    Sheet transfer apparatus and method for transferring sheet using the same

    公开(公告)号:US11021336B2

    公开(公告)日:2021-06-01

    申请号:US16567488

    申请日:2019-09-11

    Abstract: A sheet transfer apparatus and a method for transferring a sheet using a sheet transfer apparatus are provided. A sheet transfer apparatus includes: a table on which two or more sheets, which are continuously laminated, are configured to be seated; a sheet adsorbing part on the table to adsorb a first sheet, which is at an uppermost portion, of the two or more laminated sheets at a pressure; and an air discharge part on the table and adjacent to the sheet adsorbing part, and the air discharge part is configured to discharge air to a surface of the first sheet adsorbed to the sheet adsorbing part.

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