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公开(公告)号:US20210135112A1
公开(公告)日:2021-05-06
申请号:US16936773
申请日:2020-07-23
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Jeunghoon Kim , Seungmin Jin
Abstract: According to one or more embodiments, a mask assembly includes a mask frame including an opening and a portion surrounding the opening, and a mask arranged on the mask frame and including a first region and a second region, and a deposition material is passable through the first region corresponding to the opening, and the second region is around the first region, and the first region includes deposition openings, and the second region includes dummy openings, at least some of the dummy openings including centers arranged to deviate from a straight line connecting centers of the deposition openings, and a width of each of the deposition openings is the same as a width of each of the dummy openings.
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公开(公告)号:US11569487B2
公开(公告)日:2023-01-31
申请号:US17063676
申请日:2020-10-05
Applicant: Samsung Display Co., Ltd.
Inventor: Jaemin Hong , Hanul Kwen , Jeunghoon Kim , Jakyung Yu , Sujin Lee
Abstract: Provided are a display device, a mask assembly, and an apparatus and a method for manufacturing the display device. The mask assembly includes: a mask frame; at least two mask sheets installed on the mask frame, each of the mask sheets including a plurality of openings; and at least two thin shielding plates installed on the mask frame such that the thin shielding plates are spaced apart from each other and shield a portion of the plurality of openings of each mask sheet, wherein one of the mask sheets and the thin shielding plates includes a shielding portion between the thin shielding plates spaced apart from each other, the shielding portion selectively blocking at least portions of the openings so as to form a deposition region having a shape other than a rectangle or a square.
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3.
公开(公告)号:US20180040857A1
公开(公告)日:2018-02-08
申请号:US15651808
申请日:2017-07-17
Applicant: Samsung Display Co., Ltd.
Inventor: Jaemin Hong , Hanul Kwen , Jeunghoon Kim , Jakyung Yu , Sujin Lee
Abstract: Provided are a display device, a mask assembly, and an apparatus and a method for manufacturing the display device. The mask assembly includes: a mask frame; at least two mask sheets installed on the mask frame, each of the mask sheets including a plurality of openings; and at least two thin shielding plates installed on the mask frame such that the thin shielding plates are spaced apart from each other and shield a portion of the plurality of openings of each mask sheet, wherein one of the mask sheets and the thin shielding plates includes a shielding portion between the thin shielding plates spaced apart from each other, the shielding portion selectively blocking at least portions of the openings so as to form a deposition region having a shape other than a rectangle or a square.
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公开(公告)号:US11597995B2
公开(公告)日:2023-03-07
申请号:US16953123
申请日:2020-11-19
Applicant: Samsung Display Co., Ltd.
Inventor: Jeunghoon Kim , Seungmin Jin , Jaemin Hong
Abstract: Provided are a method of manufacturing a mask that has a high precision configured to minimize a shadow effect, and a method of manufacturing a display device. The method of manufacturing a mask includes: tensioning a mask sheet; bonding the mask sheet that is tensioned to a mask frame; and forming an opening in the mask sheet by irradiating laser light on the mask sheet such that an inner wall of the opening has a slope with respect to a surface of the mask sheet.
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公开(公告)号:US20210285086A1
公开(公告)日:2021-09-16
申请号:US16953123
申请日:2020-11-19
Applicant: Samsung Display Co., Ltd.
Inventor: Jeunghoon Kim , Seungmin Jin , Jaemin HONG
Abstract: Provided are a method of manufacturing a mask that has a high precision configured to minimize a shadow effect, and a method of manufacturing a display device. The method of manufacturing a mask includes: tensioning a mask sheet; bonding the mask sheet that is tensioned to a mask frame; and forming an opening in the mask sheet by irradiating laser light on the mask sheet such that an inner wall of the opening has a slope with respect to a surface of the mask sheet.
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公开(公告)号:US10532377B2
公开(公告)日:2020-01-14
申请号:US14882902
申请日:2015-10-14
Applicant: Samsung Display Co., Ltd.
Inventor: Jaemin Hong , Hyunseung Kang , Hanul Kwen , Jeunghoon Kim , Hanyoung Kim , Younghoon Roh , Jihye Seo , Wooyoung Jung , Pilseon Ji
Abstract: A mask assembly for thin film deposition includes: a mask frame including an opening, the mask frame disposed surrounding the opening; and a mask unit including: first masks mounted on the mask frame, the first masks extending in a first direction; a second mask disposed on the first masks, the second mask including: one open hole; and at least one foreign substance discharge hole; and a third mask disposed on the second mask, the third mask extending in a second direction and including deposition holes, wherein the second direction crosses the first direction, and wherein a substrate is disposed on the third mask.
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7.
公开(公告)号:US20160167083A1
公开(公告)日:2016-06-16
申请号:US14719155
申请日:2015-05-21
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Jeunghoon Kim , Yoonchan Oh , Jangwoo Kim , Heeseak Noh , Bongjun Park , Taeyong An , Daesik Jang , Cheolgyu Jeong , Jaemin Hong
CPC classification number: B05B12/20 , B05C21/005 , C23C14/042 , H01L51/0011 , H01L51/56
Abstract: A mask frame assembly includes a frame and a mask including a pattern portion having a pattern hole and a shape memory alloy portion. A method of manufacturing a mask frame assembly includes forming a pattern portion having a pattern hole and a shape memory alloy portion on a mask, the shape memory alloy portion extending in a first direction at a deposition temperature, and coupling the mask to a frame by extending the mask at a room temperature in a second direction perpendicular to the first direction.
Abstract translation: 荫罩框架组件包括框架和掩模,其包括具有图形孔的图案部分和形状记忆合金部分。 一种掩模框架组件的制造方法包括在掩模上形成具有图案孔和形状记忆合金部分的图案部分,所述形状记忆合金部分在沉积温度下沿第一方向延伸,并将所述掩模与框架相连 在垂直于第一方向的第二方向上在室温下延伸掩模。
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公开(公告)号:US11696487B2
公开(公告)日:2023-07-04
申请号:US16936773
申请日:2020-07-23
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Jeunghoon Kim , Seungmin Jin
CPC classification number: H10K71/166 , C23C14/042 , C23C14/12 , C23C14/24 , H10K59/12 , H10K71/00 , H10K71/164
Abstract: According to one or more embodiments, a mask assembly includes a mask frame including an opening and a portion surrounding the opening, and a mask arranged on the mask frame and including a first region and a second region, and a deposition material is passable through the first region corresponding to the opening, and the second region is around the first region, and the first region includes deposition openings, and the second region includes dummy openings, at least some of the dummy openings including centers arranged to deviate from a straight line connecting centers of the deposition openings, and a width of each of the deposition openings is the same as a width of each of the dummy openings.
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公开(公告)号:US20210020874A1
公开(公告)日:2021-01-21
申请号:US17063676
申请日:2020-10-05
Applicant: Samsung Display Co., Ltd.
Inventor: Jaemin Hong , Hanul Kwen , Jeunghoon Kim , Jakyung Yu , Sujin Lee
Abstract: Provided are a display device, a mask assembly, and an apparatus and a method for manufacturing the display device. The mask assembly includes: a mask frame; at least two mask sheets installed on the mask frame, each of the mask sheets including a plurality of openings; and at least two thin shielding plates installed on the mask frame such that the thin shielding plates are spaced apart from each other and shield a portion of the plurality of openings of each mask sheet, wherein one of the mask sheets and the thin shielding plates includes a shielding portion between the thin shielding plates spaced apart from each other, the shielding portion selectively blocking at least portions of the openings so as to form a deposition region having a shape other than a rectangle or a square.
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10.
公开(公告)号:US10818877B2
公开(公告)日:2020-10-27
申请号:US15651808
申请日:2017-07-17
Applicant: Samsung Display Co., Ltd.
Inventor: Jaemin Hong , Hanul Kwen , Jeunghoon Kim , Jakyung Yu , Sujin Lee
Abstract: Provided are a display device, a mask assembly, and an apparatus and a method for manufacturing the display device. The mask assembly includes: a mask frame; at least two mask sheets installed on the mask frame, each of the mask sheets including a plurality of openings; and at least two thin shielding plates installed on the mask frame such that the thin shielding plates are spaced apart from each other and shield a portion of the plurality of openings of each mask sheet, wherein one of the mask sheets and the thin shielding plates includes a shielding portion between the thin shielding plates spaced apart from each other, the shielding portion selectively blocking at least portions of the openings so as to form a deposition region having a shape other than a rectangle or a square.
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