公开(公告)号：US20150102831A1

公开(公告)日：2015-04-16

申请号：US14505602

申请日：2014-10-03

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Byoung-Hun LEE ,  Yong-Hun KIM ,  Young-Gon LEE

IPC: G01R31/26 ,  G01R1/073

CPC classification number: G01R31/2621 ,  G01R31/11

Abstract: A probing assembly includes a TDR probe coupling a time-domain reflectometry (TDR) device with a semiconductor device including a transistor therein, the transistor having a gate electrode, a source electrode, and a drain electrode on a substrate, wherein the TDR probe includes a first probe tip connecting the gate electrode to a signal line of the TDR device, and second to fourth probe tips connecting the source electrode, the drain electrode, and a bulk region of the substrate to ground lines of the TDR device, respectively.

Abstract translation: 探测组件包括将时域反射（TDR）器件与其中包括晶体管的半导体器件耦合的TDR探针，晶体管在衬底上具有栅电极，源电极和漏电极，其中TDR探针包括 将栅电极连接到TDR器件的信号线的第一探针尖端，以及分别将源电极，漏电极和基片的体区连接到TDR器件的接地线的第二至第四探针尖端。