公开(公告)号：US20240093368A1

公开(公告)日：2024-03-21

申请号：US18136070

申请日：2023-04-18

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： HONGTAEK LIM ,  HAKJUNG KIM ,  HONGSIK PARK ,  DONGGI LEE

IPC: C23C16/458 ,  C23C16/44 ,  C23C16/455 ,  H01L21/285 ,  H01L21/687

CPC classification number: C23C16/4585 ,  C23C16/4408 ,  C23C16/45565 ,  H01L21/28568 ,  H01L21/68721

Abstract: An edge ring includes a ring body having an axis parallel to a first direction; and a plurality of protrusions provided at an inner side surface of the ring body and protruding toward the axis, the plurality of protrusions being spaced apart from each other in a circumference direction of the edge ring, wherein a first distance between the axis and a first point on the inner side surface of the ring body between two adjacent protrusions of the plurality of protrusions is larger than a second distance between the axis and a second point on the inner side surface of the ring body at which a protrusion of the plurality of protrusions is provided.