公开(公告)号：US20240093368A1

公开(公告)日：2024-03-21

申请号：US18136070

申请日：2023-04-18

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： HONGTAEK LIM ,  HAKJUNG KIM ,  HONGSIK PARK ,  DONGGI LEE

IPC: C23C16/458 ,  C23C16/44 ,  C23C16/455 ,  H01L21/285 ,  H01L21/687

CPC classification number: C23C16/4585 ,  C23C16/4408 ,  C23C16/45565 ,  H01L21/28568 ,  H01L21/68721

Abstract: An edge ring includes a ring body having an axis parallel to a first direction; and a plurality of protrusions provided at an inner side surface of the ring body and protruding toward the axis, the plurality of protrusions being spaced apart from each other in a circumference direction of the edge ring, wherein a first distance between the axis and a first point on the inner side surface of the ring body between two adjacent protrusions of the plurality of protrusions is larger than a second distance between the axis and a second point on the inner side surface of the ring body at which a protrusion of the plurality of protrusions is provided.

公开(公告)号：US20180108422A1

公开(公告)日：2018-04-19

申请号：US15615849

申请日：2017-06-07

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： HYUNKYO OH ,  SEUNGKYUNG RO ,  HEEWON LEE ,  SEONGNAM KWON ,  OAK-HA KIM ,  DONGGI LEE

IPC: G11C16/34 ,  G11C29/52 ,  G11C29/04 ,  G06N99/00

Abstract: A memory system includes multiple storage devices that each include a nonvolatile memory device. A client device is configured to collect deterioration information of the nonvolatile memory devices provided from the storage devices. A server device is configured to receive the collected deterioration information and to predict a degree of deterioration of the nonvolatile memory devices in real time by performing machine learning based on the collected deterioration information and initial deterioration information. The client device determines a read level of the nonvolatile memory device based on the degree of deterioration of the nonvolatile memory devices from the server device. The storage device sets the nonvolatile memory device to operate based on the read level determined in the client device.