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公开(公告)号：US20250132173A1
公开(公告)日：2025-04-24
申请号：US18736256
申请日：2024-06-06
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Heegeun Kim , Donghoon Kwon
IPC: H01L21/67
Abstract: An example substrate cleaning apparatus includes a roll brush that cleans a surface of a substrate. The roll brush includes a drive shaft with a predetermined length and a plurality of brush members positioned around an outside circumference of the drive shaft. One of the plurality of the brush members is provided with a rotation speed lower than the others.
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