公开(公告)号：US20140135968A1

公开(公告)日：2014-05-15

申请号：US14018980

申请日：2013-09-05

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ho-Ki LEE ,  Heeseok KIM ,  Sungho HAN

IPC: G05B13/00

CPC classification number: G05B19/4184 ,  G05B2219/31483 ,  G05B2219/32201 ,  G05B2219/45031 ,  Y02P90/14 ,  Y02P90/20 ,  Y02P90/22 ,  Y02P90/26 ,  Y02P90/86

Abstract: In one example embodiment, a method of maintaining a semiconductor manufacturing line includes setting up a recipe for controlling an implementation of a unit process based on which at least one semiconductor device is manufactured by a manufacturing facility. The method further includes collecting reference data of the manufacturing facility being controlled according to the reference recipe and obtaining a statistical model of the reference data and a health index of the statistical model, the health index being a limit beyond which an output of the semiconductor manufacturing line decreases. The method further includes controlling the implementation of the unit process and obtaining monitoring data during the implementation of the unit process using the statistical mode. The method further includes renewing the statistical model based on the monitoring data.

Abstract translation: 在一个示例实施例中，维持半导体生产线的方法包括设置用于控制由制造设备制造至少一个半导体器件的单元工艺的实现的配方。 该方法还包括收集根据参考食谱进行控制的制造设施的参考数据，并且获得参考数据的统计模型和统计模型的健康指数，健康指数是超出该限制的半导体制造的输出 线减少。 该方法还包括在使用统计模式执行单元处理期间控制单元处理的实现并获得监视数据。 该方法还包括基于监视数据更新统计模型。