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公开(公告)号：US10394115B2
公开(公告)日：2019-08-27
申请号：US15442780
申请日：2017-02-27
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Dong-Kil Yun , Sunghoon Kim , Jae-Eun Lee , Hyangja Yang
Abstract: A method for verifying mask data in a computing device includes receiving layout data, receiving mask data, determining an interaction number between a pattern corresponding to the layout data and a pattern corresponding to the mask data, and detecting an error of the mask data based on the interaction number.
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