公开(公告)号：US20130247589A1

公开(公告)日：2013-09-26

申请号：US13848831

申请日：2013-03-22

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： In Ho SEO ,  Jin Sung KNO ,  Jae Chol JOO ,  Yong Ho CHOI ,  Seung Min CHOI ,  Chang Hoon CHOI

IPC: G01B9/02 ,  F25B21/02

CPC classification number: G01B9/02075 ,  F25B21/02 ,  F25B21/04

Abstract: A position measurement device includes a light source, a reflector coupled to a test object, a light detector between the light source and reflector, and a controller to measure a position of the test object based on an interference pattern generated by a reference beam and a measurement beam output from the light detector. The controller also controls a temperature of the light detector by generating signals for a heat exchanger having a Peltier region coupled to the light detector. The signals including a first signal to cause the heat exchanger to remove heat from the light receiver and a second signal to cause the heat exchanger to apply heat to the light receiver.

Abstract translation: 位置测量装置包括光源，耦合到测试对象的反射器，光源和反射器之间的光检测器，以及基于由参考光束产生的干涉图案测量被测物体的位置的控制器， 测量光束从光检测器输出。 控制器还通过产生具有耦合到光检测器的珀尔帖区域的热交换器的信号来控制光检测器的温度。 信号包括使热交换器从光接收器移除热量的第一信号和第二信号，以使热交换器向光接收器施加热量。