公开(公告)号：US20130247589A1

公开(公告)日：2013-09-26

申请号：US13848831

申请日：2013-03-22

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： In Ho SEO ,  Jin Sung KNO ,  Jae Chol JOO ,  Yong Ho CHOI ,  Seung Min CHOI ,  Chang Hoon CHOI

IPC: G01B9/02 ,  F25B21/02

CPC classification number: G01B9/02075 ,  F25B21/02 ,  F25B21/04

Abstract: A position measurement device includes a light source, a reflector coupled to a test object, a light detector between the light source and reflector, and a controller to measure a position of the test object based on an interference pattern generated by a reference beam and a measurement beam output from the light detector. The controller also controls a temperature of the light detector by generating signals for a heat exchanger having a Peltier region coupled to the light detector. The signals including a first signal to cause the heat exchanger to remove heat from the light receiver and a second signal to cause the heat exchanger to apply heat to the light receiver.

Abstract translation: 位置测量装置包括光源，耦合到测试对象的反射器，光源和反射器之间的光检测器，以及基于由参考光束产生的干涉图案测量被测物体的位置的控制器， 测量光束从光检测器输出。 控制器还通过产生具有耦合到光检测器的珀尔帖区域的热交换器的信号来控制光检测器的温度。 信号包括使热交换器从光接收器移除热量的第一信号和第二信号，以使热交换器向光接收器施加热量。

公开(公告)号：US20150369588A1

公开(公告)日：2015-12-24

申请号：US14839553

申请日：2015-08-28

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kwang Soo KIM ,  Hyun Jae LEE ,  Byeong Hwan JEON ,  Chang Hoon CHOI

IPC: G01B11/00

CPC classification number: G01B11/00 ,  G01B11/24 ,  G01B11/28 ,  G01B2210/56

Abstract: According to example embodiments, an optical measurement apparatus may include: a station configured to support a measurement target; an image acquisition unit configured to acquire a one-dimensional (1D) line image of the measurement target; a driver configured to move the station and the image acquisition unit; and a controller. The controller may be configured to control the driver and the image acquisition unit to acquire a plurality of 1D line images of the measurement target while varying a distance between the image acquisition unit and the measurement target to generate a two-dimensional (2D) scan image from combining the plurality of 1D line images; and to detect a pattern of the measurement target based on comparing a plurality of 2D reference images and the 2D scan image. The optical measurement apparatus may measure critical dimensions of non-repeating ultrafine patterns at high speed.

Abstract translation: 根据示例实施例，光学测量装置可以包括：被配置为支持测量目标的站; 图像获取单元，被配置为获取所述测量对象的一维（1D）线图像; 驱动器，被配置为移动所述站和所述图像获取单元; 和控制器。 控制器可以被配置为控制驱动器和图像获取单元，以在改变图像获取单元和测量对象之间的距离的同时获取测量对象的多个1D线图像，以生成二维（2D）扫描图像 从组合多个1D线图像; 并且基于比较多个2D参考图像和2D扫描图像来检测测量对象的图案。 光学测量装置可以高速度地测量非重复超细纹图案的临界尺寸。

公开(公告)号：US20250047999A1

公开(公告)日：2025-02-06

申请号：US18738376

申请日：2024-06-10

Applicant: Samsung Electronics Co., Ltd.

Inventor： Chang Hoon CHOI ,  Hyun Yup KWAK ,  Yong Mi LEE ,  Seung Won CHOI ,  Jong Seong CHOI ,  Sung Jin HUH

IPC: H04N25/771 ,  H04N9/64 ,  H04N25/40 ,  H04N25/60

Abstract: A system on chip and method for operating a system on chip are provided. A system on chip includes a shared memory configured to store image data and a processor configured to: generate a first correction value by performing first image processing for a first pixel value of a first pixel of the image data received from the shared memory, generate a second correction value by performing second image processing, which is different from the first image processing, for the first pixel value of the image data received from the shared memory, generate a third correction value by performing third image processing, which is different from the first image processing and the second image processing, for the first pixel value of the image data received from the shared memory, and output a first pixel correction value that is changed from the first pixel value by comparing the first to third correction values with the first pixel value and selecting one of the first to third correction values.

公开(公告)号：US20240334084A1

公开(公告)日：2024-10-03

申请号：US18416543

申请日：2024-01-18

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Chang Hoon CHOI ,  Hyunyup Kwak ,  Jaeuk Ahn ,  Yongmi Lee ,  Seungwon Choi

IPC: H04N25/683

CPC classification number: H04N25/683

Abstract: A defective pixel correction device is provided. The defective pixel correction device includes: a pixel grading circuit configured to output a grade map including a plurality of grades indicating defect levels and respectively corresponding to a plurality of pixels included in an input image; a pixel selection circuit configured to select one or more candidate pixels from among the plurality of pixels, based on whether the plurality of grades correspond to a correction level, in the grade map; and a correction circuit configured to correct the one or more candidate pixels.

公开(公告)号：US20240185558A1

公开(公告)日：2024-06-06

申请号：US18513871

申请日：2023-11-20

Applicant: Samsung Electronics Co., Ltd.

Inventor： Chang Hoon CHOI ,  Dong-Bum CHOI ,  Hyun Yup KWAK ,  Seung Won CHOI

IPC: G06V10/56 ,  G06T5/00 ,  G06T7/90 ,  G06V10/75 ,  H04N1/60

CPC classification number: G06V10/56 ,  G06T5/005 ,  G06T7/90 ,  G06V10/751 ,  H04N1/60 ,  G06T2207/10024

Abstract: An image sensing device including an image sensor configured to output a raw image by capturing an image of a subject and an image signal processor configured to perform a bad pixel correction process on the raw image on an image patch-by-image patch unit, compare pixels of an image patch of the raw image with a local saturation threshold value, determine a state of local saturation of the image patch based on a number of saturated pixels whose pixel values exceed the local saturation threshold value, and output a corrected image patch, which is obtained by correcting a pixel of the image patch with a corrected pixel value, with a replacement pixel value, or with a raw pixel value depending on the state of local saturation of the image patch.

公开(公告)号：US20190323973A1

公开(公告)日：2019-10-24

申请号：US16242088

申请日：2019-01-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Myung Ho JUNG ,  Young Su RYU ,  Sung Chai KIM ,  Jong Su KIM ,  Won Guk SEO ,  Chang Hoon CHOI ,  Jeong Su HA

IPC: G01N21/956 ,  G06T7/00 ,  G01N21/95 ,  G06T7/11 ,  H01L21/67 ,  H01L21/677

Abstract: An inspection apparatus for a semiconductor process and a semiconductor process device, the inspection apparatus including a transferer configured to transfer a process object between a plurality of chambers; at least one line camera installed above the transferer, the at least one line camera being configured to generate an original image by capturing an image of the process object transferred by the transferer; and a controller configured to receive the original image and to perform an inspection of the process object by correcting distortion of the original image due to a change in transfer speed of the transferer.

公开(公告)号：US20130214121A1

公开(公告)日：2013-08-22

申请号：US13773736

申请日：2013-02-22

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyun Jae LEE ,  Myoung Ki AHN ,  Kwang Soo KIM ,  In Ho SEO ,  Chang Hoon CHOI

IPC: G02B27/40

CPC classification number: G02B27/40 ,  G02B3/10 ,  G02B7/38

Abstract: An autofocus control apparatus includes a beam splitter, a condenser lens and a detector. The beam splitter directs light beams from a light source toward a sample and passes light beams reflected from the sample to the condenser lens. The condenser lens condenses the light beams, and the detector detects a focal point deviation of the sample relative to a focal point of the condenser lens. The focal point deviation is detected based on an intersection of a focal line passing through different focal points of the condenser lens and a light receiving plane configured to receive the light beams passing through the condenser lens.

Abstract translation: 自动对焦控制装置包括分束器，聚光透镜和检测器。 分束器将来自光源的光束引向样品，并将从样品反射的光束传递到聚光透镜。 聚光透镜冷凝光束，并且检测器检测样品相对于聚光透镜的焦点的焦点偏差。 基于通过聚光透镜的不同焦点的焦点线和被配置为接收通过聚光透镜的光束的受光面的交点，检测焦点偏差。